Patents by Inventor Duy Phan

Duy Phan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating thickness control using surface features
    Patent number: 6967054
    Abstract: A uniform coating is provided using surface features. Multiple ridges or other shapes are fabricated near an area of interest to allow for uniform coating in between the ridges. Areas at either ends of the ridges are left open to allow for excess pooling of photoresist liquid and to aid in obtaining uniform coating. The photoresist liquid or other coating fluid is applied to the sample and spun dry. A soft-bake process is performed to evaporate remaining solvents. An element, such as a diffractive, refractive, or reflective grating structure, is then formed in the area of interest using the uniform photoresist coating.
    Type: Grant
    Filed: March 6, 2003
    Date of Patent: November 22, 2005
    Assignee: Photodigm, Inc.
    Inventors: Jay Bernard Kirk, Zuhair Hilali, Duy Phan, Darren S. Lee, Duane E. Carter, Gary A. Evans, David Alan Willis
  • Coating thickness control using surface features
    Publication number: 20040175496
    Abstract: A uniform coating is provided using surface features. Multiple ridges or other shapes are fabricated near an area of interest to allow for uniform coating in between the ridges. Areas at either ends of the ridges are left open to allow for excess pooling of photoresist liquid and to aid in obtaining uniform coating. The photoresist liquid or other coating fluid is applied to the sample and spun dry. A soft-bake process is performed to evaporate remaining solvents. An element, such as a diffractive, refractive, or reflective grating structure, is then formed in the area of interest using the uniform photoresist coating.
    Type: Application
    Filed: March 6, 2003
    Publication date: September 9, 2004
    Applicant: Photodigm, Inc.
    Inventors: Jay Bernard Kirk, Zuhair Hilali, Duy Phan, Darren S. Lee, Duane E. Carter, Gary A. Evans, David Alan Willis