Patents by Inventor Dwight C. Chew

Dwight C. Chew has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Compact microwave downstream plasma system
    Patent number: 6080270
    Abstract: A compact microwave downstream plasma system includes, within a significantly small portable housing unit, a power supply, a microwave generator, a non-linear waveguide, a circulator, a dummy load, a plasma applicator, and an igniter. The microwave generator supplies microwaves to the guide to the applicator. The guide includes several curved regions that allow for a more compact design. The applicator is configured to generate a plasma and output reactants that can be used to remove photoresist layers from a wafer within a process reactor.
    Type: Grant
    Filed: July 14, 1997
    Date of Patent: June 27, 2000
    Assignee: Lam Research Corporation
    Inventors: M. Shams Tabrez, Dwight C. Chew, Patrick J. Stafford, Richard C. Riddle, Alexander S. Polyak