Abstract: A spatial RAM system uses the position of a data sensor to generate a clock pulse that is used to trigger data acquisition. As a consequence, the errors associated with time-based clock sampling are avoided. This enables more accurate sampling of data at locations desired in space and more easily allows for non-uniform sampling.

Abstract: A test structure for submicrometer metrology as used in integrated circuit manufacture comprises a bridge conductor divided into three segments by pairs of voltage taps. A first segment has no intermediate taps; a second segment has a number of dummy taps intermediate its ends; and a third segment has a single central tap, which may typically be formed in a different step than the remainder of the test structure, intermediate its ends. Preferably, the central tap extends from the same side of the bridge conductor as the taps at the ends of the third segment thereof. In order to evaluate a manufacturing operation, for example, to monitor the accuracy of registration of successive manufacturing steps, test signals are applied successively between the pairs of pads.

Abstract: A test structure for submicrometer metrology as used in integral circuit manufacture comprises a bridge conductor divided into three segments by pairs of voltage taps. A first segment has no intermediate taps; a second segment has a number of dummy taps intermediate its ends; and a third segment has a single central tap, which may typically be formed in a different step than the remainder of the test structure, intermediate its ends. Preferably, the central tap extends from the same side of the bridge conductor as the taps at the ends of the third segment thereof. In order to evaluate a manufacturing operation, for example, to monitor the accuracy of registration of successive manufacturing steps, test signals are applied successively between the pairs of pads.

Abstract: A prepatterned potentiometer precursor includes a precursor substrate; and at least two spaced apart potentiometer precursor patterns on the substrate, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps wherein the center taps of the bridges are substantially parallel to each other and are substantially wider than the end taps. A method of determining the distance between test features of test patterns on a test piece includes preparing a precursor substrate including at least two electrically conducting spaced apart potentiometer precursor patterns, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps.

Abstract: An improved flexure hinge permits both angular pivoting and longitudinal expansion and contraction and is made of a body member of solid material which is normally not flexible or expandable. A first recess is defined part-way through the body member at one longitudinally extending edge opposite second and third recesses defined through the opposite longitudinally-extending edge of the body member. The first recess is separated from each of the second and third recesses by web-like portions which are sufficiently thin to permit flexure of the body member about respective first and second axes extending through the first and second web portions, respectively. A stage, moveable along a single axis, employs four such body members, each body member having two double web hinge devices, one double web device being located at each end of the body member. The four body members are disposed symmetrically about the axis along which the stage is moved, and symmetrically about a transverse axis.