Patents by Inventor E. Halberg

E. Halberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad for use in polishing work pieces
    Publication number: 20060194530
    Abstract: A polishing/lapping pad for use in CMP and other polishing and lapping operations is presented that comprises multiple channels designed to facilitate in the manipulation of slurry into specific locations on the wafer being planarized.
    Type: Application
    Filed: February 25, 2005
    Publication date: August 31, 2006
    Inventors: Clifford Thomson, Scott Daskiewich, E. Halberg