Patents by Inventor Eberhard Tempel

Eberhard Tempel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching solution comprising hydrofluoric acid
    Patent number: 7501072
    Abstract: This invention relates to etching solutions which comprise hydrofluoric acid and organic solvents for use in the process for the production of integrated circuits. The etching solutions according to the invention are particularly suitable for the selective etching of doped silicate layers.
    Type: Grant
    Filed: April 2, 2007
    Date of Patent: March 10, 2009
    Assignee: BASF Aktiengesellschaft
    Inventors: Claudia Wiegand, Rudolf Rhein, Eberhard Tempel
  • Etching solution comprising hydrofluoric acid
    Publication number: 20070218700
    Abstract: This invention relates to etching solutions which comprise hydrofluoric acid and organic solvents for use in the process for the production of integrated circuits. The etching solutions according to the invention are particularly suitable for the selective etching of doped silicate layers.
    Type: Application
    Filed: April 2, 2007
    Publication date: September 20, 2007
    Inventors: Claudia Wiegand, Rudolf Rhein, Eberhard Tempel
  • System for conveying liquids without pulsing
    Patent number: 6623248
    Abstract: A system tot the pulsation-free delivery of liquids, which system may be used for high-purity, liquid chemicals in the semiconductor industry.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: September 23, 2003
    Assignee: Merck Patent GmbH
    Inventors: Claus Dusemund, Klaus Freissler, Wilfried Jammer, Michael Poth, Alberto Dix, Eberhard Tempel