Abstract: Metal disks of alloys having a high ratio of tensile strength to specific gravity, such as copper-beryllium and aluminum-containing titanium alloys containing also molybdenum or vanadium or vanadium and chromium, are etched to produce arrays of rotor and stator vanes integral with a mounting rim for a turbomolecular pump. The vanes are set by twisting about a substantially radial axis in the mid-plane of the disk. The angle of set decreses by 35.degree. at the suction side to 10.degree. at the prevacuum side both for the rotor vane arrays and the stator vane arrays that are interleaved. High velocities of rotation and therefore high suction power and extremely low producible vacuum pressures are made possible.