Patents by Inventor Ed Derks

Ed Derks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sonic immersion process system and methods
    Patent number: 6774056
    Abstract: A process system for processing a semiconductor wafer or other similar flat workpiece has a head including a workpiece holder. A motor in the head spins the workpiece. A head lifter lowers the head to move the workpiece into a bath of liquid in a bowl. Sonic energy is introduced into the liquid and travels through the liquid to the workpiece, to assist in processing. The head is lifted to bring the workpiece to a rinse position. The bath liquid is drained. The workpiece is rinsed via radial spray nozzles in the base. The head is lifted to a dry position. A reciprocating swing arm sprays a drying fluid onto the bottom surface of the spinning wafer, to dry the wafer.
    Type: Grant
    Filed: July 19, 2002
    Date of Patent: August 10, 2004
    Assignee: Semitool, Inc.
    Inventors: Jon Kuntz, Steven Peace, Ed Derks, Brian Aegerter
  • Sonic immersion process system and methods
    Publication number: 20030056814
    Abstract: A process system for processing a semiconductor wafer or other similar flat workpiece has a head including a workpiece holder. A motor in the head spins the workpiece. A head lifter lowers the head to move the workpiece into a bath of liquid in a bowl. Sonic energy is introduced into the liquid and travels through the liquid to the workpiece, to assist in processing. The head is lifted to bring the workpiece to a rinse position. The bath liquid is drained. The workpiece is rinsed via radial spray nozzles in the base. The head is lifted to a dry position. A reciprocating swing arm sprays a drying fluid onto the bottom surface of the spinning wafer, to dry the wafer.
    Type: Application
    Filed: July 19, 2002
    Publication date: March 27, 2003
    Applicant: Semitool, Inc.
    Inventors: Jon Kuntz, Steven Peace, Ed Derks, Brian Aegerter