Patents by Inventor Ed Haywood

Ed Haywood has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROCESS SEQUENCING FOR HPC ALD SYSTEM
    Publication number: 20120149209
    Abstract: A combinatorial processing method is provided. The combinatorial processing method includes providing a flow of fluid over segregated sectors of a substrate to process the segregated sectors of the substrate in parallel without significantly exposing any section to a reagent without first applying a film and without subjecting any section to the same process step at the same time. Differently processed, segregated sectors may be generated in parallel.
    Type: Application
    Filed: December 14, 2010
    Publication date: June 14, 2012
    Inventors: Ed Haywood, Pragati Kumar