Patents by Inventor Ed Korczynski

Ed Korczynski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Site-isolated rapid thermal processing methods and apparatus
    Patent number: 9023739
    Abstract: Methods and apparatus are described that allow the investigation of process variables used in RTP systems to be varied in a combinatorial manner across a plurality of site-isolated regions designated in the surface of a substrate. The methods and apparatus allow process variables such as power, dwell time, light source, cooling gas composition, cooling gas flow rate, reactive gas composition, reactive gas flow rate, and substrate support temperature and the like to be investigated.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: May 5, 2015
    Assignee: Intermolecular, Inc.
    Inventors: Ed Korczynski, Dipankar Pramanik
  • Site-Isolated Rapid Thermal Processing Methods and Apparatus
    Publication number: 20140179123
    Abstract: Methods and apparatus are described that allow the investigation of process variables used in RTP systems to be varied in a combinatorial manner across a plurality of site-isolated regions designated in the surface of a substrate. The methods and apparatus allow process variables such as power, dwell time, light source, cooling gas composition, cooling gas flow rate, reactive gas composition, reactive gas flow rate, and substrate support temperature and the like to be investigated.
    Type: Application
    Filed: December 20, 2012
    Publication date: June 26, 2014
    Applicant: INTERMOLECULAR, INC.
    Inventors: Ed Korczynski, Dipankar Pramanik