Patents by Inventor Eddie Ze Thean Ooi

Eddie Ze Thean Ooi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PEDESTAL POLISHING APPARATUS
    Publication number: 20250041990
    Abstract: A cleaning apparatus for a vacuum pedestal and method of cleaning a pedestal used in semiconductor device fabrication are described. The apparatus has a baseplate, a collar attached to the baseplate, a cap disposed on the collar, and a shaft that extends from the collar through the cap, collar and baseplate. A manual rotatable handle is attached to a shaft portion that extends from the cap. Motion of the handle in a downward direction is impeded by the cap. A disk is attached to a lower portion of the shaft and is separated from a bottom of the baseplate due to weighted rings, which are attached to the disk and surround the lower portion of the shaft such that a vertical float is present between the shaft and the cap. At least one abrasive pad is attached to the disk to remove build-up on the underlying pedestal surface.
    Type: Application
    Filed: October 25, 2024
    Publication date: February 6, 2025
    Inventors: Robert McKinney, Sushanth Kondi, Mahendra Byrapura Manjunath, Gary B. Lind, Vinayakaraddy Gulabal, Andrew Paul Eib, Eddie Ze Thean Ooi, Vishnu Sai Yalamarty
  • Pedestal polishing apparatus
    Patent number: 12162117
    Abstract: A cleaning apparatus for a vacuum pedestal and method of cleaning a pedestal used in semiconductor device fabrication are described. The apparatus has a baseplate, a collar attached to the baseplate, a cap disposed on the collar, and a shaft that extends from the collar through the cap, collar and baseplate. A manual rotatable handle is attached to a shaft portion that extends from the cap. Motion of the handle in a downward direction is impeded by the cap. A disk is attached to a lower portion of the shaft and is separated from a bottom of the baseplate due to weighted rings, which are attached to the disk and surround the lower portion of the shaft such that a vertical float is present between the shaft and the cap. At least one abrasive pad is attached to the disk to remove build-up on the underlying pedestal surface.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: December 10, 2024
    Assignee: Lam Research Corporation
    Inventors: Robert McKinney, Sushanth Kondi, Mahendra Byrapura Manjunath, Gary B. Lind, Vinayakaraddy Gulabal, Andrew Paul Eib, Eddie Ze Thean Ooi, Vishnu Sai Yalamarty
  • PEDESTAL POLISHING APPARATUS
    Publication number: 20230016450
    Abstract: A cleaning apparatus for a vacuum pedestal and method of cleaning a pedestal used in semiconductor device fabrication are described. The apparatus has a baseplate, a collar attached to the baseplate, a cap disposed on the collar, and a shaft that extends from the collar through the cap, collar and baseplate. A manual rotatable handle is attached to a shaft portion that extends from the cap. Motion of the handle in a downward direction is impeded by the cap. A disk is attached to a lower portion of the shaft and is separated from a bottom of the baseplate due to weighted rings, which are attached to the disk and surround the lower portion of the shaft such that a vertical float is present between the shaft and the cap. At least one abrasive pad is attached to the disk to remove build-up on the underlying pedestal surface.
    Type: Application
    Filed: December 11, 2020
    Publication date: January 19, 2023
    Inventors: Robert McKinney, Sushanth Kondi, Mahendra Byrapura Manjunath, Gary B. Lind, Vinayakaraddy Gulabal, Andrew Paul Eib, Eddie Ze Thean Ooi, Vishnu Sai Yalamarty