Abstract: Systems and methods are described for obtaining two-wavelength differential-phase holograms. A method includes determining a difference between a filtered analyzed recorded first spatially heterodyne hologram phase and a filtered analyzed recorded second spatially-heterodyned hologram phase.

Abstract: Systems and methods are described for reduction of reference hologram noise and reduction of Fourier space smearing, especially in the context of direct-to-digital holography (off-axis interferometry). A method of reducing reference hologram noise includes: recording a plurality of reference holograms; processing the plurality of reference holograms into a corresponding plurality of reference image waves; and transforming the corresponding plurality of reference image waves into a reduced noise reference image wave.

Abstract: Systems and method are described for addressable field emission array (AFEA) chips. A plurality of individually addressable cathodes are integrated with an electrostatic focusing stack and/or a plurality of detectors on the addressable field emission array. The systems and methods provide advantages including the avoidance of space-charge blow-up.

Abstract: Systems and methods are described for obtaining two-wavelength differential-phase holograms. A method includes determining a difference between a filtered analyzed recorded first spatially heterodyne hologram phase and a filtered analyzed recorded second spatially-heterodyned hologram phase.

Abstract: In digital holographic imaging systems, streamed holograms are compared on a pixel-by-pixel basis for defect detection after hologram generation. An automated image matching, registration and comparison method with feedback confidence allows for runtime wafer inspection, scene matching refinement, rotational wafer alignment and the registration and comparison of difference images.

Abstract: Systems and methods are described for reduction of reference hologram noise and reduction of Fourier space smearing, especially in the context of direct-to-digital holography (off-axis interferometry). A method of reducing reference hologram noise includes: recording a plurality of reference holograms; processing the plurality of reference holograms into a corresponding plurality of reference image waves; and transforming the corresponding plurality of reference image waves into a reduced noise reference image wave.

Abstract: Systems and methods are described for off-axis illumination direct-to-digital holography.

Abstract: A system and method for detecting differences between complex images are disclosed. The method includes acquiring a first complex image and a second complex image and determining if an aberration value difference exists between the first and second complex images. The aberration value difference is corrected by iteratively modifying the first complex image by an aberration function and comparing the modified first complex image with the second complex image in a high frequency range. The method further determines if the modified first complex image matches the second complex image by modifying the second complex image with a low frequency ratio to replace low frequency components of the second complex image with low frequency components of the first complex image. The high frequency components of the modified first complex image and the modified second complex images are then compared to determine if the first complex image matches the second complex image.

Abstract: Systems and methods are described for off-axis illumination direct-to-digital holography.

Abstract: Systems and methods are described for an electron holography microscopy.

Abstract: Systems and methods are described for an electron holography microscope. A method includes changing a size of an electron object image with a set of electron lenses; creating an interference pattern from the electron object image; and imaging interference fringes of the interference pattern onto an image plane, while not changing a magnification of the interference pattern. An apparatus includes a first set of electron lenses adapted to change an electron object image size; an electron biprism coupled to the first set of electron lenses; and a second set of electron lenses coupled to the electron biprism, the second set of electron lenses adapted to image interference fringes of an interference pattern created by the electron biprism onto an image plane without changing a magnification of the interference pattern.

Abstract: Systems and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a pluralitly of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The systems and methods provide advantages including the avoidance of space-charge blow-up.

Abstract: Systems and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a pluralitly of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The systems and methods provide advantages including the avoidance of space-charge blow-up.

Abstract: Systems and methods for direct-to-digital holography are described. An apparatus includes a laser; a beamsplitter optically coupled to the laser; a reference beam mirror optically coupled to the beamsplitter; an object optically coupled to the beamsplitter, a focusing lens optically coupled to both the reference beam mirror and the object; and a digital recorder optically coupled to the focusing lens. A reference beam is incident upon the reference beam mirror at a non-normal angle, and the reference beam and an object beam are focused by the focusing lens at a focal plane of the digital recorder to form an image. The systems and methods provide advantages in that computer assisted holographic measurements can be made.

Abstract: Systems and methods for direct-to-digital holography are described. An apparatus includes a laser; a beamsplitter optically coupled to the laser; a reference beam mirror optically coupled to the beamsplitter; an object optically coupled to the beamsplitter, a focusing lens optically coupled to both the reference beam mirror and the object; and a digital recorder optically coupled to the focusing lens. A reference beam is incident upon the reference beam mirror at a non-normal angle, and the reference beam and an object beam are focused by the focusing lens at a focal plane of the digital recorder to form an image. The systems and methods provide advantages in that computer assisted holographic measurements can be made.