Patents by Inventor Edilson L. Falcao-Filho

Edilson L. Falcao-Filho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Efficient high-harmonic-generation-based EUV source driven by short wavelength light
    Patent number: 8704198
    Abstract: Extreme ultraviolet radiation is generated based on high-order harmonic generation. First, a driver pulse is generated from a drive laser. Second, the infrared driver pulse is passed through a second harmonic generator with an output wavelength in the range from 400 to 700 nm. Third, the pulse is then passed through a gas medium, which can be inside a resonant cavity, to generate a high-order harmonic in the form of extreme ultraviolet radiation.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: April 22, 2014
    Assignee: Massachusetts Institute of Technology
    Inventors: Franz X. Kaertner, Edilson L. Falcao-Filho, Chien-Jen Lai, Kyung-Han Hong, Tso Yee Fan
  • Apparatus and method for generating high-intensity optical pulses with an enhancement cavity
    Patent number: 8649086
    Abstract: An enhancement cavity includes a plurality of focusing mirrors, at least one of which defines a central aperture having a diameter greater than 1 mm. The mirrors are configured to form an optical pathway for closed reflection and transmission of the optical pulse within the enhancement cavity. Ring-shaped optical pulses having a peak intensity at a radius greater than 0.5 mm from a central axis are directed into the enhancement cavity. Accordingly, the peak intensity of the optical pulse is distributed so as to circumscribe the central apertures in the apertured mirrors, and the mirrors are structured to focus the pulse about the aperture toward a central spot area where the pulse is focused to a high intensity.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: February 11, 2014
    Assignee: Massachusetts Institute of Technology
    Inventors: Franz X. Kartner, Gilberto Abram, William P. Putnam, Shu-Wei Huang, Edilson L. Falcao-Filho
  • Efficient High-Harmonic-Generation-Based EUV Source Driven by Short Wavelength Light
    Publication number: 20110140009
    Abstract: Extreme ultraviolet radiation is generated based on high-order harmonic generation. First, a driver pulse is generated from a drive laser. Second, the infrared driver pulse is passed through a second harmonic generator with an output wavelength in the range from 400 to 700 nm. Third, the pulse is then passed through a gas medium, which can be inside a resonant cavity, to generate a high-order harmonic in the form of extreme ultraviolet radiation.
    Type: Application
    Filed: December 13, 2010
    Publication date: June 16, 2011
    Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: Franz X. Kaertner, Edilson L. Falcao-Filho, Chien-Jen Lai, Kyung-Han Hong, Tso Yee Fan
  • APPARATUS AND METHOD FOR GENERATING HIGH-INTENSITY OPTICAL PULSES WITH AN ENHANCEMENT CAVITY
    Publication number: 20110073784
    Abstract: An enhancement cavity includes a plurality of focusing mirrors, at least one of which defines a central aperture having a diameter greater than 1 mm. The mirrors are configured to form an optical pathway for closed reflection and transmission of the optical pulse within the enhancement cavity. Ring-shaped optical pulses having a peak intensity at a radius greater than 0.5 mm from a central axis are directed into the enhancement cavity. Accordingly, the peak intensity of the optical pulse is distributed so as to circumscribe the central apertures in the apertured mirrors, and the mirrors are structured to focus the pulse about the aperture toward a central spot area where the pulse is focused to a high intensity.
    Type: Application
    Filed: September 30, 2010
    Publication date: March 31, 2011
    Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: Franz X. Kartner, Gilberto Abram, William P. Putnam, Shu-Wei Huang, Edilson L. Falcao-Filho