Patents by Inventor Edith T. T. Ong

Edith T. T. Ong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Nonplanar lithography and devices formed thereby
    Patent number: 4767695
    Abstract: A new method for lithographically patterning nonplanar substrates is disclosed. In accordance with this method, a nonplanar substrate surface is patterned by initially substantially conformably coating the surface with a resist. Conformality is achieved by depositing the resist either from the vapor phase or from a mist. In addition, the motions of the constituents of the vapor or mist should be sufficiently random so that the angular flux distribution at any point on the nonplanar substrate surface to be coated is substantially identical to that at any other point to be coated.
    Type: Grant
    Filed: May 28, 1987
    Date of Patent: August 30, 1988
    Assignee: American Telephone and Telegraph Company, AT&T Bell Laboratories
    Inventors: Edith T. T. Ong, King L. Tai, Yiu-Huen Wong