Abstract: A lens system for use with a high laser power density scanning system is disclosed and includes a first lens group having one or more refractive optical elements therein. The first lens group is in communication with at least one high average power laser scanning system and is configured to transmit at least one high average laser power density signal there through. At least a second lens group having one or more refractive optical elements therein is in communication with the laser scanning system via the first lens group. The second lens group is configured to transmit the high average laser power density signal there through. At least one diffractive optical element may be in communication with at least one of the first lens group and the second lens group and is configured to transmit the at least one high average laser power density signal there through.

Abstract: A high resolution objective lens assembly (20, 120, 220, 320) is implemented with refractive lens elements made of modified fused silica for operation at deep ultraviolet (DUV) wavelengths to reduce birefringence-caused image aberrations. The high resolution is achieved by an optical design that is characterized by a very high numerical aperture (NA) and short wavelength operation.