Patents by Inventor Edmundo Reyes

Edmundo Reyes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultra-high vacuum transport and storage
    Patent number: 10153282
    Abstract: An apparatus for transporting or storing at least one semiconductor wafer in an ultra-high vacuum is provided. A portable vacuum transfer pod is provided comprising an internal wafer storage chamber for storing one or more wafers and a wafer support for supporting at least one wafer within the internal wafer storage chamber. A passively capable vacuum pump capable of passive vacuum pumping is in fluid connection with the internal wafer storage chamber and is mechanically connected to the portable vacuum transfer pod. A shut off valve for opening and closing the fluid connection is between the passively capable vacuum pump and the internal wafer storage chamber.
    Type: Grant
    Filed: August 11, 2017
    Date of Patent: December 11, 2018
    Assignee: Lam Research Corporation
    Inventors: Theodoros Panagopoulos, Richard Gould, Edmundo Reyes, John Boniface, Ivan Berry, Alexander Dulkin, Bart van Schravendijk