Abstract: A method for optical contact bonding components includes: placing a first surface (2a) of a first component (2) onto a second surface (3a) of a second component (3), to form an air film, and pressing the first surface against the second surface for optical contact bonding of the two components. Placing and pressing the first component is carried out by a robot (4). A laminar gas flow (10) is generated between the first and second surfaces with a ventilation device (9). A related apparatus (1) includes: the robot, configured to place the first surface onto the second surface thereby forming an air film. The robot presses the first surface against the second surface, to optically contact bond the first and second components. A holding device (8) holds the second component during the placing and pressing. A ventilation device generates the laminar gas flow between the first and second surfaces.

Abstract: An optical element for reflecting radiation, such as EUV radiation, comprises: a substrate; a reflective coating applied to a surface of the substrate; a plurality of cooling channels, which run in the substrate below the surface on which the reflective coating is applied; a distributor for connecting at least one cooling fluid inlet to the plurality of cooling channels; and a collector for connecting the plurality of cooling channels to at least one cooling fluid outlet. The distributor and/or the collector are integrated into at least one, optionally rod-like insert component which is introduced into at least one to cavity formed in the substrate. An optical arrangement, such as an EUV lithography system, comprises: at least one optical element formed in the manner described further above; and a cooling device which is designed for the flowing of a cooling fluid through the plurality of cooling channels.

Abstract: A gripper is described as including two lateral flanks that are directly or indirectly connected to each other at one end, generating a space between them containing an actuator whose lateral boundaries have at least one opening accessible from the outside. At least one reinforcement rib is allocated to at least one of the lateral flanks. A method for manufacturing the gripper is also described.

Abstract: A gripper is described as including two lateral flanks that are directly or indirectly connected to each other at one end, providing a space between them including an actuator, the lateral boundaries of which space have at least one opening accessible from the outside. At least one louver runs across the opening and divides the opening such that the partial surfaces resulting from the louver limit or prevent accessibility to the opening. A method for manufacturing the gripper is also described.

Abstract: A clamping jaw for clamping or holding a workpiece is described. The clamping jaw includes a base body and a clamping contour, which is provided for abutment against a workpiece and can be cooled by a cooling device. The cooling device is implemented by at least one coolant duct, which is provided for receiving a coolant and which is formed in the base body by a generative production (e.g., additive manufacturing) process. The formation of the base body is free of auxiliary bores. Furthermore, a method for manufacturing a clamping jaw is described.

Abstract: A gripper is described as including two lateral flanks that are directly or indirectly connected to each other at one end, generating a space between them containing an actuator whose lateral boundaries have at least one opening accessible from the outside. At least one reinforcement rib is allocated to at least one of the lateral flanks. A method for manufacturing the gripper is also described.

Abstract: An interior grasper is described with an actuator that can be adjusted between a clamped position and a released position, and an axially adjustable clamping cone that is allocated to the actuator and that engages a clamping element. The clamping element is formed in one piece with the holding plate and interacts with a tool and/or a work piece.

Abstract: A gripper is described as including two lateral flanks that are directly or indirectly connected to each other at one end, providing a space between them including an actuator, the lateral boundaries of which space have at least one opening accessible from the outside. At least one louver runs across the opening and divides the opening such that the partial surfaces resulting from the louver limit or prevent accessibility to the opening. A method for manufacturing the gripper is also described.

Abstract: A clamping device for clamping a workpiece, having a base body and at least one clamp which is adjustable relative to the base body, at least one cavity is formed in the base body, a reinforcement is formed in the cavity.

Abstract: A centric clamping vice for centric clamping of workpieces is provided that includes a base support having a longitudinal axis, on which a first jaw mount, guided by a first carriage, and a second jaw mount, guided by a second carriage, are adjustably supported along an adjustment path oriented parallel to the longitudinal axis with the aid of a spindle drive. A pair of first slides is assigned to the first carriage, and a pair of second slides is assigned to the second carriage, and the difference between the track width of the first slides and the track width of second slides is greater than the width of second slides.

Abstract: A centric clamping vice for centric clamping of workpieces is provided that includes a base support having a longitudinal axis, on which a first jaw mount, guided by a first carriage, and a second jaw mount, guided by a second carriage, are adjustably supported along an adjustment path oriented parallel to the longitudinal axis with the aid of a spindle drive. A pair of first slides is assigned to the first carriage, and a pair of second slides is assigned to the second carriage, and the difference between the track width of the first slides and the track width of second slides is greater than the width of second slides.