Abstract: A substrate is secured on a chuck that maintains a top surface of the substrate in a substantially level orientation. The chuck is positioned within a cavity of a vessel such that a body portion of the chuck is maintained in a spaced apart relationship with a surface of the cavity. An electroless plating solution is disposed in a region between the body portion of the chuck and the surface of the cavity such that an upper surface of the electroless plating solution is at a level lower than the substrate. The chuck is lowered within the cavity to cause the electroless plating solution to be displaced upward and flow over the top surface of the substrate in a substantially uniform manner from a periphery of the substrate to a center of the substrate. The chuck is then raised such that the electroless plating solution flows off of the substrate.

Abstract: A body structure has an inner region shape that defines a cavity within the body structure. The cavity within the body structure is designed to hold a fluid. A chuck includes a top that is capable of holding a substrate, and a body portion that has a complementary shape with respect to the inner region shape of the body structure. The complementary shape of the chuck body portion at least partially aligns with the inner region shape that defines the body structure cavity. The chuck body portion is designed to move into the cavity of the body structure and displace the fluid held within the cavity, so as to shift the fluid over the top of the chuck. The body portion of the chuck is also designed to move out of the cavity of the body structure, so as to remove the fluid from over the top of the chuck.

Abstract: A body structure has an inner region shape that defines a cavity within the body structure. The cavity within the body structure is designed to hold a fluid. A chuck includes a top that is capable of holding a substrate, and a body portion that has a complementary shape with respect to the inner region shape of the body structure. The complementary shape of the chuck body portion at least partially aligns with the inner region shape that defines the body structure cavity. The chuck body portion is designed to move into the cavity of the body structure and displace the fluid held within the cavity, so as to shift the fluid over the top of the chuck. The body portion of the chuck is also designed to move out of the cavity of the body structure, so as to remove the fluid from over the top of the chuck.