Patents by Inventor Edward Atalla

Edward Atalla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vertical wafer platform systems and methods for fast wafer cleaning and measurement
    Publication number: 20060213537
    Abstract: A multi-axis positioning system in a vertical wafer platform includes a measurement module in a semiconductor processing chamber, the measurement module having a focus position to collect data from the wafer; means for gripping a wafer at a wafer edge; and means for positioning the gripped wafer in a non-horizontal orientation at the focus position to allow access to one or both wafer surfaces.
    Type: Application
    Filed: March 23, 2005
    Publication date: September 28, 2006
    Inventor: Edward Atalla