Patents by Inventor Edward Chia Kai Tseng

Edward Chia Kai Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching compositions and methods for using same
    Patent number: 10400167
    Abstract: A composition and method using same useful for etching a semiconductor substrate comprising: from about 25 to 86% by weight of water; from about 0 to about 60% by weight of a water-miscible organic solvent; from about 1 to about 30% by weight of a base comprising a quartenary ammonium compound; from about 1 to about 50% by weight of an amine compound wherein the amine compound is selected from the group consisting of a secondary amine, a tertiary amine, and mixtures thereof; from about 0 to about 5% by weight of a buffering agent; from about 0 to about 15% by weight of a corrosion inhibitor.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: September 3, 2019
    Assignee: VERSUM MATERIALS US, LLC
    Inventors: Wen Dar Liu, Yi-Chia Lee, Tianniu Chen, Thomas Mebrahtu, Aiping Wu, Edward Chia Kai Tseng, Gene Everad Parris
  • Etching Compositions and Methods for Using Same
    Publication number: 20170145311
    Abstract: A composition and method using same useful for etching a semiconductor substrate comprising: from about 25 to 86% by weight of water; from about 0 to about 60% by weight of a water-miscible organic solvent; from about 1 to about 30% by weight of a base comprising a quartenary ammonium compound; from about 1 to about 50% by weight of an amine compound wherein the amine compound is selected from the group consisting of a secondary amine, a tertiary amine, and mixtures thereof; from about 0 to about 5% by weight of a buffering agent; from about 0 to about 15% by weight of a corrosion inhibitor.
    Type: Application
    Filed: November 21, 2016
    Publication date: May 25, 2017
    Applicant: Air Products and Chemicals, Inc.
    Inventors: Wen Dar Liu, Yi-Chia Lee, Tianniu Chen, Thomas Mebrahtu, Aiping Wu, Edward Chia Kai Tseng, Gene Everad Parris