Patents by Inventor Edward D. Roberts

Edward D. Roberts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4722882
    Abstract: A method of manufacturing a semiconductor device, in which method a pattern is etched by a dry etching process, for example, in a substrate protected by a resist pattern which is the negative of the pattern to be etched. In order to obtain a resist pattern which has adequate resistance to dry etching and which has been produced from a resist film having a high sensitivity, the resist pattern is produced in two stages. First a pattern is formed in a resist film present on a substrate, which resist film has been formed from a polymer made by polymerizing a monomer of the structure ##STR1## wherein R.sub.1 is an alkyl group, Cl, Br, CN, H or R.sub.2, R.sub.2 is --COCl, --COBr, --COOH or --CONH.sub.2, and R.sub.1 does not react with R.sub.2. Then the material of the resist pattern is reacted with a mono- or poly-functional organic compound, with an organic siloxane containing SiH groups or other Si-containing functional groups which react with the resist pattern material, or with a metallo-organic compound.
    Type: Grant
    Filed: January 6, 1986
    Date of Patent: February 2, 1988
    Assignee: U.S. Philips Corporation
    Inventor: Edward D. Roberts
  • Patent number: 4061832
    Abstract: A positive-working electron resist which comprises a film-forming co-polymer B-D which is cross-linkable by carboxylic acid anhydride groups. The co-polymer B-D is formed from an unsaturated organic compound B and an unsaturated carboxylic acid chloride D. The cross-links are formed by heating a film of the resist in a moist atmosphere, some of the carboxylic acid chloride groups being hydrolysed so as to form carboxylic acid groups, at least some of these carboxylic acid groups reacting with carboxylic acid groups of different molecules of the co-polymer B-D so as to form carboxylic acid anhydride bridge links between these different molecules. The cross-linked material is insoluble in solvents in which the monomers B and D and the co-polymer B-D are normally soluble.
    Type: Grant
    Filed: March 19, 1976
    Date of Patent: December 6, 1977
    Assignee: U.S. Philips Corporation
    Inventor: Edward D. Roberts