Patents by Inventor Edward F. Hinds

Edward F. Hinds has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching chamber with subchamber
    Patent number: 9576824
    Abstract: In an apparatus for etching a semiconductor wafer or sample (101), the semiconductor wafer or sample is placed on a sample holder (104) disposed in a first chamber (103). The combination of the semiconductor wafer or sample and the sample holder is enclosed within a second chamber (130) inside the first chamber. Gas is evacuated from the second chamber and an etching gas is introduced into the second chamber, but not into the first chamber, to etch the semiconductor wafer or sample.
    Type: Grant
    Filed: February 22, 2006
    Date of Patent: February 21, 2017
    Assignee: SPTS Technologies Limited
    Inventors: Kyle S. Lebouitz, Edward F. Hinds
  • ETCHING CHAMBER WITH SUBCHAMBER
    Publication number: 20090233449
    Abstract: In an apparatus for etching a semiconductor wafer or sample (101), the semiconductor wafer or sample is placed on a sample holder (104) disposed in a first chamber (103). The combination of the semiconductor wafer or sample and the sample holder is enclosed within a second chamber (130) inside the first chamber. Gas is evacuated from the second chamber and an etching gas is introduced into the second chamber, but not into the first chamber, to etch the semiconductor wafer or sample.
    Type: Application
    Filed: February 22, 2006
    Publication date: September 17, 2009
    Applicant: XACTIX, INC.
    Inventors: Kyle S. Lebouitz, Edward F. Hinds