Patents by Inventor Edward H. Mayer

Edward H. Mayer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Downstream apparatus and technique
    Patent number: 4554047
    Abstract: The use of a particular configuration in a downstream etching apparatus and technique allows the rapid and economical treatment of a plurality of semiconductor substrates. Additionally, through the use of this technique, global and localized loading effects are avoided. The downstream apparatus utilizes a discharge region that is relatively large compared to the volume occupied by the substrates. Additionally, the concentration of the etchant species in the effluent is maintained at a level that is of the same order as that produced in the discharge region.
    Type: Grant
    Filed: October 12, 1984
    Date of Patent: November 19, 1985
    Assignees: AT&T Bell Laboratories, AT&T Technologies
    Inventors: Joel M. Cook, Daniel L. Flamm, Edward H. Mayer, Bernard C. Seiler