Patents by Inventor Edward Heller

Edward Heller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reduced contaminant gas injection system and method of using
    Patent number: 7743731
    Abstract: A gas injection system includes a diffuser to distribute a process gas in a processing chamber. The gas injection system may be utilized in a polysilicon etching system involving corrosive process gases.
    Type: Grant
    Filed: March 30, 2006
    Date of Patent: June 29, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Takashi Enomoto, Masaaki Hagihara, Akiteru Ko, Shinji Hamamoto, Masafumi Urakawa, Arthur H. Laflamme, Jr., Edward Heller
  • Reduced contaminant gas injection system and method of using
    Publication number: 20070235136
    Abstract: A gas injection system includes a diffuser to distribute a process gas in a processing chamber. The gas injection system may be utilized in a polysilicon etching system involving corrosive process gases.
    Type: Application
    Filed: March 30, 2006
    Publication date: October 11, 2007
    Inventors: Takashi Enomoto, Masaaki Hagihara, Akiteru Ko, Shinji Hamamoto, Masafumi Urakawa, Arthur H. Laflamme, Edward Heller