Abstract: A breakaway unit sits atop a base plate of a coordinate measuring machine via a breakaway coupling system. A crash detection system including at least one crash detection sensor mounted on the breakaway unit and a crash detection controller stops the machine when vertical movement of the breakaway unit exceeds a threshold. Should collision occur, the breakaway coupling system allows the breakaway unit to separate from the base plate, preventing damage to instruments mounted thereon. The kinematic coupling system preferably comprises tooling balls engaging respective vee cones, vee grooves, and/or flats.

Abstract: A Z-axis assembly for an optical inspection apparatus, comprises a base; first and second parallel rails secured to the base; a plurality of carriages supported by ball bearings for translatory movement parallel to the Z-axis on each of the first and second rails; the carriages having a line of travel through the ball bearings in contact with their respective rails; a support structure secured to the carriages; and a lens assembly secured to the support structure such to be movable parallel to the Z-axis, the lens assembly including an optical axis parallel to the Z-axis and the lines of travel, and optical axis and the lines of travel lie on a common plane.

Abstract: A fully automated surface profiling system having a loading chamber and an adjacent measurement chamber containing a phase differential laser optical scanning system and a five-axis positioner having a vacuum chuck for holding and orienting a wafer for surface profile measurement. The positioner can displace a mounted wafer lengthwise and crosswise of the chamber, can rotate the wafer about vertical and horizontal axes through the positioner, and can rotate the wafer about its own axis. Each motion is motor-driven and can be carried out independently of all the others or in compound motion as needed. The positioner can accommodate a series of replaceable chucks for holding wafers of different diameters. The loading chamber has a cassette dock for receiving a cassette containing wafers to be tested, a robotic server, and a prealigner. All operations within the profilometer are controlled by a programmable CPU at a control station.

Abstract: A previewing profiler includes apparatus to scan the surface of an object and to provide a display relating to the smoothness of the surface at a microscopic level. The system includes providing a polarized collimated laser beam through a Nomarski type prism and focusing the resulting beams on the surface to be scanned. The system further includes a user operable rotatable mirror which may be inserted, upon operator command, between the laser and Nomarski prism, which mirror is designed to leak a small percentage of the laser light. Another source of noncollimated polarized light, provided through a condensing lens, is provided to the rotatable mirror to be directed along the same path through the Nomarski prism and to be focused at a point above the surface being scanned, thereby providing a substantially larger illuminated area on the surface. The reflected light from both the laser beam and additional noncollimated light is focused on a CCD array and then displayed on a display.