Patents by Inventor Edward L. McGuire, III

Edward L. McGuire, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scan controller for ion implanter device
    Patent number: 4593200
    Abstract: A scan controller 14 for directing an ion beam 152 from an ion implanter device 142 onto a wafer 148 includes a generator 10, 12 for generating first and second signals for guiding the ion beam along two separate axes plus a compensator 28, 72 for compensating the signal so that the speed of the impact point of the ion beam 152 on the wafer 148 is substantially constant as the ion beam 152 scans across the wafer 148 to obtain a substantially even distribution of ions on the wafer 148 along the path of the ion beam 152.
    Type: Grant
    Filed: March 6, 1984
    Date of Patent: June 3, 1986
    Inventor: Edward L. McGuire, III