Patents by Inventor Edward M. Middlebrook

Edward M. Middlebrook has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In situ dry cleaning process for poly gate etch
    Patent number: 6197699
    Abstract: The present invention provides a method for cleaning a contaminated chamber used in the manufacture of semiconductor devices. In one embodiment, the method comprises the steps of injecting, under pressure, a gas mixture of a fluorine-containing gas and an inert gas into the contaminated chamber, radiating the contaminated chamber with a radio frequency during the step of injecting, and removing volatile by-products or solid particulates from the contaminated chamber by performing pump-purge cycles within the contaminated chamber.
    Type: Grant
    Filed: January 20, 1998
    Date of Patent: March 6, 2001
    Assignee: Lucent Technologies Inc.
    Inventors: Larry B. Fritzinger, Cynthia C. Lee, Edward M. Middlebrook, John M. Sniegowski