Patents by Inventor Edward S. Murrer

Edward S. Murrer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8871619
    Abstract: Solar cells and other semiconductor devices are fabricated more efficiently and for less cost using an implanted doping fabrication system. A system for implanting a semiconductor substrate includes an ion source (such as a single-species delivery module), an accelerator to generate from the ion source an ion beam having an energy of no more than 150 kV, and a beam director to expose the substrate to the beam. In one embodiment, the ion source is single-species delivery module that includes a single-gas delivery element and a single-ion source. Alternatively, the ion source is a plasma source used to generate a plasma beam. The system is used to fabricate solar cells having lightly doped photo-receptive regions and more highly doped grid lines. This structure reduces the formation of “dead layers” and improves the contact resistance, thereby increasing the efficiency of a solar cell.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: October 28, 2014
    Assignee: Intevac, Inc.
    Inventors: Babak Adibi, Edward S. Murrer
  • Patent number: 8697553
    Abstract: Solar cells in accordance with the present invention have reduced ohmic losses. These cells include photo-receptive regions that are doped less densely than adjacent selective emitter regions. The photo-receptive regions contain multiple four-sided pyramids that decrease the amount of light lost to the solar cell by reflection. The smaller doping density in the photo-receptive regions results in less blue light that is lost by electron-hole recombination. The higher doping density in the selective emitter region allows for better contacts with the metallic grid coupled to the multiple emitter regions. Preferably, the selective emitter and photo-receptive regions are both implanted using a narrow ion beam containing the dopants.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: April 15, 2014
    Assignee: Intevac, Inc
    Inventors: Babak Adibi, Edward S. Murrer
  • Publication number: 20110162703
    Abstract: A method of fabricating a solar cell comprising: providing a semiconducting wafer having a front surface, a back surface, and a background doped region; performing a set of ion implantations of dopant into the semiconducting wafer to form a back alternatingly-doped region extending from the back surface of the semiconducting wafer to a location between the back surface and the front surface, wherein the back doped region comprises laterally alternating first back doped regions and second back doped regions, and wherein the first back doped regions comprise a different charge type than the second back doped regions and the background doped region; and disposing a back metal contact layer onto the back surface of the semiconducting wafer, wherein the back metal contact layer is aligned over the first and second back doped regions and is configured to conduct electrical charge from the first and second back doped regions.
    Type: Application
    Filed: March 19, 2010
    Publication date: July 7, 2011
    Applicant: SOLAR IMPLANT TECHNOLOGIES, INC.
    Inventors: Babak Adibi, Edward S. Murrer, Henry Hieslmair
  • Publication number: 20090308450
    Abstract: Solar cells in accordance with the present invention have reduced ohmic losses. These cells include photo-receptive regions that are doped less densely than adjacent selective emitter regions. The photo-receptive regions contain multiple four-sided pyramids that decrease the amount of light lost to the solar cell by reflection. The smaller doping density in the photo-receptive regions results in less blue light that is lost by electron-hole recombination. The higher doping density in the selective emitter region allows for better contacts with the metallic grid coupled to the multiple emitter regions. Preferably, the selective emitter and photo-receptive regions are both implanted using a narrow ion beam containing the dopants.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 17, 2009
    Applicant: SOLAR IMPLANT TECHNOLOGIES INC.
    Inventors: Babak Adibi, Edward S. Murrer
  • Publication number: 20090308439
    Abstract: A solar cell device and method of making are provided. The device includes a silicon substrate including a preexisting dopant. A homogeneous lightly doped region is formed on a surface of the silicon substrate to form a junction between the preexisting dopant and the lightly doped region. A heavily doped region is selectively implanted on the surface of the silicon substrate. A seed layer is formed over the heavily doped region. A metal contact is formed over the seed layer. The device can include an anti-reflective coating. In one embodiment, the heavily doped region forms a parabolic shape. The heavily doped regions can each be a width on the silicon substrate a distance in the range 50 to 200 microns. Also, the heavily doped regions can be laterally spaced on the silicon substrate a distance in the range 1 to 3 mm from each other. The seed layer can be a silicide.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 17, 2009
    Applicant: SOLAR IMPLANT TECHNOLOGIES INC.
    Inventors: Babak Adibi, Edward S. Murrer
  • Publication number: 20090308440
    Abstract: A method of forming a solar cell, the method comprising: providing a semiconducting wafer having a pre-doped region; performing a first ion implantation of a dopant into the semiconducting wafer to form a first doped region over the pre-doped region, wherein the first ion implantation has a concentration-versus-depth profile; and performing a second ion implantation of a dopant into the semiconducting wafer to form a second doped region over the pre-doped region, wherein the second ion implantation has a concentration-versus-depth profile different from that of the first ion implantation, wherein at least one of the first doped region and the second doped region is configured to generate electron-hole pairs upon receiving light, and wherein the first and second ion implantations are performed independently of one another.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 17, 2009
    Applicant: SOLAR IMPLANT TECHNOLOGIES INC.
    Inventors: Babak Adibi, Edward S. Murrer
  • Publication number: 20090309039
    Abstract: Solar cells and other semiconductor devices are fabricated more efficiently and for less cost using an implanted doping fabrication system. A system for implanting a semiconductor substrate includes an ion source (such as a single-species delivery module), an accelerator to generate from the ion source an ion beam having an energy of no more than 150 kV, and a beam director to expose the substrate to the beam. In one embodiment, the ion source is single-species delivery module that includes a single-gas delivery element and a single-ion source. Alternatively, the ion source is a plasma source used to generate a plasma beam. The system is used to fabricate solar cells having lightly doped photo-receptive regions and more highly doped grid lines. This structure reduces the formation of “dead layers” and improves the contact resistance, thereby increasing the efficiency of a solar cell.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 17, 2009
    Applicant: SOLAR IMPLANT TECHNOLOGIES INC.
    Inventors: Babak Adibi, Edward S. Murrer
  • Patent number: 4967305
    Abstract: Electronic door lock system for use with a door mounted in a door frame and has a dead bolt and a latch mounted on the door. A control unit is mounted on the door in the vicinity of the dead bolt and the latch and includes a battery and electronic circuitry connected to the battery and manually operable contacts for selectively operating the dead bolt and the latch so that they can be moved to unlatched positions under the control of first and second hand-operated members.
    Type: Grant
    Filed: January 6, 1989
    Date of Patent: October 30, 1990
    Assignee: DataTrak, Inc.
    Inventors: Edward S. Murrer, Mir A. Imran