Patents by Inventor Edward Siqi Luo
Edward Siqi Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11949202Abstract: A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.Type: GrantFiled: February 15, 2018Date of Patent: April 2, 2024Assignee: Cymer, LLCInventors: Yzzer Roman Gutierrez, Walter Dale Gillespie, Edward Siqi Luo, Dinesh Adinath Kanawade
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Patent number: 11949203Abstract: A gas chamber supply system includes a gas source configured to fluidly connect to a gas chamber and to supply a gas mixture to the gas chamber, the gas source including: a pre-prepared gas supply including a gas mixture, the gas mixture including a plurality of gas components and lacking a halogen; a recycled gas supply including the gas mixture; and a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply. The gas chamber supply also includes a control system configured to: determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply to as the gas source based on the determination.Type: GrantFiled: January 10, 2019Date of Patent: April 2, 2024Assignee: Cymer, LLCInventors: Yzzer Roman Gutierrez, Walter Dale Gillespie, Edward Siqi Luo, Dinesh Adinath Kanawade
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Patent number: 11754541Abstract: An apparatus includes: a gas maintenance system having a gas supply system fluidly connected to one or more gas discharge chambers; a detection apparatus fluidly connected to each gas discharge chamber; and a control system connected to the gas maintenance system and the detection apparatus. The detection apparatus includes: a vessel defining a reaction cavity that houses a metal oxide and is fluidly connected to the gas discharge chamber for receiving mixed gas including fluorine from the gas discharge chamber in the reaction cavity, the vessel enabling a reaction between the fluorine of the received mixed gas and the metal oxide to form a new gas mixture including oxygen; and an oxygen sensor fluidly connected to the new gas mixture to sense an amount of oxygen within the new gas mixture. The control system is configured to estimate a concentration of fluorine in the received mixed gas.Type: GrantFiled: September 10, 2018Date of Patent: September 12, 2023Assignee: Cymer, LLCInventors: Joshua Jon Thornes, Rahul Ahlawat, Edward Siqi Luo, Gamaralalage G. Padmabandu
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Publication number: 20230016894Abstract: Provided is a light source apparatus and an electrode design for use in a discharge chamber of the light source apparatus. The discharge chamber is configured to hold a gas discharge medium configured to output a light beam. The light source apparatus include a pair of opposed electrodes configured to excite a gas medium to form a discharge plasma. At least one electrode of the pair of opposing electrodes may include recessed portions or hollowed-out portions at each end of the electrode, or at other suitable locations. The disclosed electrode structures improve uniformity of the erosion profile of the electrodes, significantly extending the lifespan of the discharge chamber by redistributing the discharge particle flux through the electrode with an optimized design of the electrode geometry, as the local discharge particle flux is reduced at the recessed portions.Type: ApplicationFiled: December 10, 2020Publication date: January 19, 2023Inventors: Edward Siqi Luo, Zhou Wang
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Patent number: 11349273Abstract: Disclosed is a laser discharge chamber in which useful lifetime is extended by local electrical tuning using one or a combination of design of the chamber internal geometry, placement and distribution of components within the chamber such as electrodes, current returns, and capacitors, and selective electrical isolation of portions of the components.Type: GrantFiled: December 17, 2018Date of Patent: May 31, 2022Assignee: Cymer, LLCInventors: Edward Siqi Luo, Richard Carl Ujazdowski, Shuang Xu
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Publication number: 20210066880Abstract: Disclosed is a laser discharge chamber in which useful lifetime is extended by local electrical tuning using one or a combination of design of the chamber internal geometry, placement and distribution of components within the chamber such as electrodes, current returns, and capacitors, and selective electrical isolation of portions of the componentsType: ApplicationFiled: December 17, 2018Publication date: March 4, 2021Inventors: Edward Siqi Luo, Richard Carl Ujazdowski, Shuang Xu
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Publication number: 20200358240Abstract: A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.Type: ApplicationFiled: February 15, 2018Publication date: November 12, 2020Inventors: Yzzer Roman Gutierrez, Walter Dale Gillespie, Edward Siqi Luo, Dinesh Adinath Kanawade
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Publication number: 20200358241Abstract: A gas chamber supply system includes a gas source configured to fluidly connect to a gas chamber and to supply a gas mixture to the gas chamber, the gas source including: a pre-prepared gas supply including a gas mixture, the gas mixture including a plurality of gas components and lacking a halogen; a recycled gas supply including the gas mixture; and a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply. The gas chamber supply also includes a control system configured to: determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply to as the gas source based on the determination.Type: ApplicationFiled: January 10, 2019Publication date: November 12, 2020Inventors: Yzzer Roman Gutierrez, Walter Dale Gillespie, Edward Siqi Luo, Dinesh Adinath Kanawade
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Publication number: 20200340965Abstract: An apparatus includes: a gas maintenance system having a gas supply system fluidly connected to one or more gas discharge chambers; a detection apparatus fluidly connected to each gas discharge chamber; and a control system connected to the gas maintenance system and the detection apparatus. The detection apparatus includes: a vessel defining a reaction cavity that houses a metal oxide and is fluidly connected to the gas discharge chamber for receiving mixed gas including fluorine from the gas discharge chamber in the reaction cavity, the vessel enabling a reaction between the fluorine of the received mixed gas and the metal oxide to form a new gas mixture including oxygen; and an oxygen sensor fluidly connected to the new gas mixture to sense an amount of oxygen within the new gas mixture. The control system is configured to estimate a concentration of fluorine in the received mixed gas.Type: ApplicationFiled: September 10, 2018Publication date: October 29, 2020Inventors: Joshua Jon Thornes, Rahul Ahlawat, Edward Siqi Luo, Gamaralalage G. Padmabandu