Abstract: A contact probe includes a stylus, a sensor, and two parallel substantially planar plates. The stylus has a contact. The sensor has a substantially planar shape and includes a fixed portion, at least three thin-walled portions each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable portion to which the stylus is mounted and linked to the fixed portion via the thin-walled portions in at least three locations. The two parallel substantially planar plates are connected to the fixed portion on opposing sides and sandwich the movable portion so as to maintain a predetermined distance between the movable portion and the two parallel substantially planar plates and limit movement of the movable portion to a movable range. The sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus.

Abstract: A contact probe includes a stylus, a sensor, and two parallel substantially planar plates. The stylus has a contact. The sensor has a substantially planar shape and includes a fixed portion, at least three thin-walled portions each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable portion to which the stylus is mounted and linked to the fixed portion via the thin-walled portions in at least three locations. The two parallel substantially planar plates are connected to the fixed portion on opposing sides and sandwich the movable portion so as to maintain a predetermined distance between the movable portion and the two parallel substantially planar plates and limit movement of the movable portion to a movable range. The sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus.

Abstract: A workpiece is measured by a contact detector. The contact detector is moved relatively towards a workpiece. A characteristic of the contact detector that changes as the contact detector contacts the workpiece is measured at a plurality of times. A projected time when the characteristic of the contact detector will meet a predetermined threshold is extrapolated from the characteristic measured the plurality of times and using a processor of a computer. A trigger is set to measure coordinates of the workpiece at the projected time. Coordinates of the workpiece are measured at the projected time based on the set trigger.

Abstract: A workpiece is measured by a contact detector. The contact detector is moved relatively towards a workpiece. A characteristic of the contact detector that changes as the contact detector contacts the workpiece is measured at a plurality of times. A projected time when the characteristic of the contact detector will meet a predetermined threshold is extrapolated from the characteristic measured the plurality of times and using a processor of a computer. A trigger is set to measure coordinates of the workpiece at the projected time. Coordinates of the workpiece are measured at the projected time based on the set trigger.