Patents by Inventor Edwin den Hartog Besselink

Edwin den Hartog Besselink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
    Patent number: 11769682
    Abstract: A storage apparatus to store cassettes for substrates comprising a moveable base plate constructed and arranged to hold cassettes, an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: September 26, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Adriaan Garssen, Edwin den Hartog-Besselink
  • SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS WITH A TEMPERATURE SENSOR TO MEASURE THE TEMPERATURE OF A BEARING
    Publication number: 20230005770
    Abstract: A semiconductor substrate processing apparatus is provided with a reaction chamber; a heater to heat the reaction chamber; and a substrate support assembly. The substrate support assembly comprising: a substrate support defining an outer support surface for supporting a substrate or substrate carrier in the reaction chamber; and a base assembly including a door for sealing the reaction chamber of the apparatus. The substrate support being connected to the base assembly through a bearing that facilitates rotation of the substrate support. The substrate support assembly is provided with a temperature sensor to measure the temperature of the bearing.
    Type: Application
    Filed: June 27, 2022
    Publication date: January 5, 2023
    Inventors: Wiebren Harm Damsma, Edwin den Hartog-Besselink, Erik ter Vrugt
  • STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH
    Publication number: 20210407838
    Abstract: The invention relates to a storage apparatus to store cassettes for substrates comprising: a moveable base plate constructed and arranged to hold cassettes; an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.
    Type: Application
    Filed: September 9, 2021
    Publication date: December 30, 2021
    Inventors: Adriaan Garssen, Edwin den Hartog-Besselink
  • Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
    Patent number: 11139191
    Abstract: A storage apparatus to store cassettes for substrates comprising a moveable base plate constructed and arranged to hold cassettes, an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening is disclosed. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: October 5, 2021
    Assignee: ASM IP Holding B.V.
    Inventors: Adriaan Garssen, Edwin den Hartog-Besselink
  • STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH
    Publication number: 20200258766
    Abstract: The invention relates to a storage apparatus to store cassettes for substrates comprising: a moveable base plate constructed and arranged to hold cassettes; an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with respect to the opening. The storage apparatus is provided with a stationary sensor near the opening for detecting at least one of a presence and a correct orientation of a substrate cassette on the base plate at the opening.
    Type: Application
    Filed: August 7, 2018
    Publication date: August 13, 2020
    Inventors: Adriaan Garssen, Edwin den Hartog-Besselink
  • Cassette holder assembly for a substrate cassette and holding member for use in such assembly
    Patent number: 10672636
    Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.
    Type: Grant
    Filed: December 3, 2018
    Date of Patent: June 2, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Edwin den Hartog Besselink, Adriaan Garssen, Marco Dirkmaat
  • CASSETTE HOLDER ASSEMBLY FOR A SUBSTRATE CASSETTE AND HOLDING MEMBER FOR USE IN SUCH ASSEMBLY
    Publication number: 20190115237
    Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.
    Type: Application
    Filed: December 3, 2018
    Publication date: April 18, 2019
    Inventors: Edwin den Hartog Besselink, Adriaan Garssen, Marco Dirkmaat
  • Cassette holder assembly for a substrate cassette and holding member for use in such assembly
    Patent number: 10249524
    Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: April 2, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Edwin den Hartog Besselink, Adriaan Garssen, Marco Dirkmaat
  • CASSETTE HOLDER ASSEMBLY FOR A SUBSTRATE CASSETTE AND HOLDING MEMBER FOR USE IN SUCH ASSEMBLY
    Publication number: 20190051548
    Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.
    Type: Application
    Filed: August 9, 2017
    Publication date: February 14, 2019
    Inventors: Edwin den Hartog Besselink, Adriaan Garssen, Marco Dirkmaat