Patents by Inventor Edwin Gompel

Edwin Gompel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck
    Publication number: 20060102849
    Abstract: An apparatus including a support table for supporting a substrate is disclosed. The support table includes a plurality of support protrusions that contact the substrate during use for supporting the substrate. The support table includes a plurality of heat transfer protrusions that extend towards the substrate during use without contacting the substrate when the substrate is supported by the support protrusions. Gas-containing heat exchanging gaps for exchanging heat with the substrate extend between the heat transfer protrusions and the substrate.
    Type: Application
    Filed: October 22, 2004
    Publication date: May 18, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jeroen Johannes Mertens, Aschwin Lodewijk Hendricus Van Meer, Joost Ottens, Edwin Gompel