Patents by Inventor Edwin Johan Buijs

Edwin Johan Buijs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
    Publication number: 20040218167
    Abstract: Lorentz actuators generate heat due to electrical dissipation in the field coils. As the field through the coils changes, eddy currents are induced in cooling elements leading to undesirable damping forces and heating. The present invention provides an improved design that reduces eddy currents by incorporating slits in the cooling element. Slits are preferably perpendicular to the induced electric field and parallel to each other, and reduce the magnitude of the eddy currents by forcing them to take paths of higher electrical resistance.
    Type: Application
    Filed: March 11, 2004
    Publication date: November 4, 2004
    Applicant: ASML Netherlands B.V.
    Inventors: Sven Antoin Johan Hol, Edwin Johan Buijs, Harmen Klaas Van Der Schoot, Patricia Vreugdewater