Patents by Inventor Edwin Johannes Theodorus Smulders
Edwin Johannes Theodorus Smulders has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20240337956Abstract: An apparatus for cleaning a component for use in a lithographic apparatus, the apparatus including at least one cleaning module or a plurality of cleaning modules, wherein the at least one cleaning module or the plurality of cleaning modules include a plurality of cleaning mechanisms, and wherein the plurality of cleaning mechanisms include: at least one preparing mechanism for reducing adhesion of the particles to the component and at least one removing mechanism for removing particles from the component, or a plurality of removing mechanisms for removing particles from the component.Type: ApplicationFiled: July 8, 2022Publication date: October 10, 2024Applicant: ASML NETHERLANDS B.V.Inventors: Lucas Christiaan Johan HEIJMANS, Imre Rudolf Richard DEHNER, Raymond Wilhelmus Louis LAFARRE, Cornelis Christiaan OTTENS, Marcus Adrianus VAN DE KERKHOF, Andrey NIKIPELOV, Dennis VANOTTERDIJK, Edwin Johannes Theodorus SMULDERS, Andrei Mikhailovich YAKUNIN, Guido SALMASO, Luc VOORDECKERS, Chaitanya Krishna ANDE, Martinus Jacobus Johannes COENEN
-
Patent number: 9457549Abstract: A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface.Type: GrantFiled: March 19, 2015Date of Patent: October 4, 2016Assignee: MAPPER LITHOGRAPHY IP B.V.Inventors: Guido De Boer, Ralph Van Melle, Teunis Van De Peut, Henk Derks, Frederik Matthias Spiegelhalder, Roy Josephus Stephanus Derks, Edwin Johannes Theodorus Smulders
-
Publication number: 20150190994Abstract: A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface.Type: ApplicationFiled: March 19, 2015Publication date: July 9, 2015Inventors: Guido DE BOER, Ralph VAN MELLE, Teunis VAN DE PEUT, Henk DERKS, Frederik Matthias SPIEGELHALDER, Roy Josephus Stephanus DERKS, Edwin Johannes Theodorus SMULDERS
-
Patent number: 9036962Abstract: A method of forming an optical fiber array. The method comprises providing a substrate having a first surface and an opposing second surface. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. Additionally, a plurality of fibers is provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. For each fiber, from the first surface side of the substrate, the fiber is inserted in a corresponding aperture such that the fiber end is positioned in close proximity of the second surface. Then the fiber is bent in a predetermined direction such that the fiber abuts a side wall of the aperture at a predetermined position. Finally, the bent fibers are bonded together using an adhesive material.Type: GrantFiled: April 20, 2012Date of Patent: May 19, 2015Assignee: MAPPER LITHOGRAPHY IP B.V.Inventors: Guido De Boer, Ralph Van Melle, Teunis Van De Peut, Henk Derks, Frederik Matthias Spiegelhalder, Roy Josephus Stephanus Derks, Edwin Johannes Theodorus Smulders
-
Publication number: 20120304923Abstract: Method and system for moving a frozen adhesive particle towards a target body, comprising launching means (13) which are arranged to launch the particle (2) in its frozen form towards the target body (3, 4) via a movement path (14) through a gap between the launching means and the target body. The medium in the gap may have a temperature above the adhesive particle's melting temperature. The launching means may be arranged to launch the particle at a high speed. The launching means and the target body may have a geometry causing that the movement path is substantially vertical or substantially horizontal.Type: ApplicationFiled: May 4, 2012Publication date: December 6, 2012Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Erik Christian Nicolaas Puik, Edwin Johannes Theodorus Smulders
-
Patent number: 8236377Abstract: Method and system for moving a frozen adhesive particle towards a target body, comprising launching means (13) which are arranged to launch the particle (2) in its frozen form towards the target body (3, 4) via a movement path (14) through a gap (15) between the launching means and the target body. The medium in the gap may have a temperature above the adhesive particle's melting temperature. The launching means may be arranged to launch the particle at a high speed. The launching means and the target body may have a geometry causing that the movement path is substantially vertical or substantially horizontal.Type: GrantFiled: December 4, 2006Date of Patent: August 7, 2012Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Erik Christian Nicolaas Puik, Edwin Johannes Theodorus Smulders
-
Publication number: 20100189892Abstract: Method and system for moving a frozen adhesive particle towards a target body, comprising launching means (13) which are arranged to launch the particle (2) in its frozen form towards the target body (3, 4) via a movement path (14) through a gap (15) between the launching means and the target body. The medium in the gap may have a temperature above the adhesive particle's melting temperature. The launching means may be arranged to launch the particle at a high speed. The launching means and the target body may have a geometry causing that the movement path is substantially vertical or substantially horizontal.Type: ApplicationFiled: December 4, 2006Publication date: July 29, 2010Inventors: Erik Christian Nicolaas Puik, Edwin Johannes Theodorus Smulders
-
Publication number: 20100043958Abstract: In a method of manufacturing a multilayer device exposed surfaces of a first and second layer are forced together after applying adhesive. The first layer or stack of layers bent along its exposed surface and the exposed surface is brought into initial contact at a point or line of tangency along the bend. A temporally increasing force is exerted between the first and second layer through point or line of tangency, thereby reducing the resilient deformation of the first layer, until the bend has been forced out.Type: ApplicationFiled: December 18, 2007Publication date: February 25, 2010Applicant: Nederlandse Organisatie voor toegepast-natuuwetens chappelijk Onderzoek TNOInventors: Edwin Johannes Theodorus Smulders, Erik Peter Veninga
-
Patent number: RE48287Abstract: A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface.Type: GrantFiled: October 3, 2018Date of Patent: October 27, 2020Assignee: ASML Netherlands B.V.Inventors: Guido De Boer, Ralph Van Melle, Teunis Van De Peut, Henk Derks, Frederik Matthias Spiegelhalder, Roy Josephus Stephanus Derks, Edwin Johannes Theodorus Smulders