Abstract: An apparatus for cleaning a component for use in a lithographic apparatus, the apparatus including at least one cleaning module or a plurality of cleaning modules, wherein the at least one cleaning module or the plurality of cleaning modules include a plurality of cleaning mechanisms, and wherein the plurality of cleaning mechanisms include: at least one preparing mechanism for reducing adhesion of the particles to the component and at least one removing mechanism for removing particles from the component, or a plurality of removing mechanisms for removing particles from the component.

Abstract: A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface.

Abstract: A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface.

Abstract: A method of forming an optical fiber array. The method comprises providing a substrate having a first surface and an opposing second surface. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. Additionally, a plurality of fibers is provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. For each fiber, from the first surface side of the substrate, the fiber is inserted in a corresponding aperture such that the fiber end is positioned in close proximity of the second surface. Then the fiber is bent in a predetermined direction such that the fiber abuts a side wall of the aperture at a predetermined position. Finally, the bent fibers are bonded together using an adhesive material.

Abstract: Method and system for moving a frozen adhesive particle towards a target body, comprising launching means (13) which are arranged to launch the particle (2) in its frozen form towards the target body (3, 4) via a movement path (14) through a gap between the launching means and the target body. The medium in the gap may have a temperature above the adhesive particle's melting temperature. The launching means may be arranged to launch the particle at a high speed. The launching means and the target body may have a geometry causing that the movement path is substantially vertical or substantially horizontal.

Abstract: Method and system for moving a frozen adhesive particle towards a target body, comprising launching means (13) which are arranged to launch the particle (2) in its frozen form towards the target body (3, 4) via a movement path (14) through a gap (15) between the launching means and the target body. The medium in the gap may have a temperature above the adhesive particle's melting temperature. The launching means may be arranged to launch the particle at a high speed. The launching means and the target body may have a geometry causing that the movement path is substantially vertical or substantially horizontal.

Abstract: Method and system for moving a frozen adhesive particle towards a target body, comprising launching means (13) which are arranged to launch the particle (2) in its frozen form towards the target body (3, 4) via a movement path (14) through a gap (15) between the launching means and the target body. The medium in the gap may have a temperature above the adhesive particle's melting temperature. The launching means may be arranged to launch the particle at a high speed. The launching means and the target body may have a geometry causing that the movement path is substantially vertical or substantially horizontal.

Abstract: In a method of manufacturing a multilayer device exposed surfaces of a first and second layer are forced together after applying adhesive. The first layer or stack of layers bent along its exposed surface and the exposed surface is brought into initial contact at a point or line of tangency along the bend. A temporally increasing force is exerted between the first and second layer through point or line of tangency, thereby reducing the resilient deformation of the first layer, until the bend has been forced out.

Abstract: A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface.