Patents by Inventor Edwin Kadijk

Edwin Kadijk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070229786
    Abstract: Embodiments of a drain in a lithographic projection apparatus are described that have, for example, a feature which reduces inflow of gas into the drain during a period when no liquid is present in the drain. In one example, a passive liquid removal mechanism is provided such that the pressure of gas in the drain is equal to the ambient gas pressure and in another embodiment a flap is provided to close off a chamber during times when no liquid needs removing.
    Type: Application
    Filed: March 28, 2006
    Publication date: October 4, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Nicolaas Kemper, Sjoerd Lambertus Donders, Joost Ottens, Edwin Kadijk, Sergei Shulepov