Patents by Inventor Edwin Shafer

Edwin Shafer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Publication number: 20050140951
    Abstract: A lithographic projection apparatus is provided with an optical system built into the wafer table for producing an image of a wafer mark that is provided on the back side of the wafer. The image is located at the plane of the front side of the wafer and can be viewed by an alignment system from the front side of the wafer. Simultaneous alignment between marks on the back and front of the wafer and a mask can be performed using a pre-existing alignment system.
    Type: Application
    Filed: September 14, 2004
    Publication date: June 30, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Henricus Wilhelmus Van Buel, Keith Best, Joseph Consolini, Joeri Lof, Edwin Shafer