Patents by Inventor Edwin Sum

Edwin Sum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for reducing arcing during plasma processing
    Patent number: 7501161
    Abstract: In a first aspect, a method is provided for use during plasma processing. The first method includes the steps of (1) placing a substrate on a substrate holder of a plasma chamber; (2) positioning a cover frame adjacent and below a perimeter of the substrate; and (3) employing the cover frame to reduce arcing during plasma processing within the plasma chamber. Numerous other aspects are provided.
    Type: Grant
    Filed: June 1, 2004
    Date of Patent: March 10, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Li Hou, Qunhua Wang, Edwin Sum, John M. White
  • Methods and apparatus for reducing arcing during plasma processing
    Publication number: 20050266174
    Abstract: In a first aspect, a method is provided for use during plasma processing. The first method includes the steps of (1) placing a substrate on a substrate holder of a plasma chamber; (2) positioning a cover frame adjacent and below a perimeter of the substrate; and (3) employing the cover frame to reduce arcing during plasma processing within the plasma chamber. Numerous other aspects are provided.
    Type: Application
    Filed: June 1, 2004
    Publication date: December 1, 2005
    Inventors: Li Hou, Qunhua Wang, Edwin Sum, John White