Patents by Inventor Edwin Verschueren
Edwin Verschueren has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230377835Abstract: A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.Type: ApplicationFiled: July 24, 2023Publication date: November 23, 2023Applicant: FEI CompanyInventors: Bart Jozef Janssen, Edwin Verschueren, Erik Franken
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Patent number: 11756762Abstract: A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.Type: GrantFiled: February 3, 2022Date of Patent: September 12, 2023Assignee: FEI CompanyInventors: Bart Jozef Janssen, Edwin Verschueren, Erik Franken
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Publication number: 20230184696Abstract: The present invention relates to a method to reduce drift of a sample and/or its image in a microscopy system, wherein the method comprises determining an expected thermal drift of the sample, and compensating for the drift of the sample and/or its image based upon the expected thermal drift. The present invention also relates to a corresponding microscopy system and a computer program product to perform the method according to the present invention.Type: ApplicationFiled: December 15, 2022Publication date: June 15, 2023Applicant: FEI CompanyInventors: Hugo VAN LEEUWEN, Edwin VERSCHUEREN, Johannes VAN DEN OETELAAR, Martin VERHEIJEN, Ronald LAMERS, Marcel VAN WENSVEEN
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Publication number: 20230120177Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.Type: ApplicationFiled: December 19, 2022Publication date: April 20, 2023Applicant: FEI CompanyInventors: Edwin Verschueren, Paul Tacx
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Publication number: 20230101676Abstract: A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.Type: ApplicationFiled: November 29, 2022Publication date: March 30, 2023Applicant: FEI CompanyInventors: Edwin Verschueren, Paul Tacx
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Patent number: 11562877Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element. A first displacement of the mover element can be determined. A first compensation signal to be applied to one or more drive unit shear elements can be determined based at least in part on the first displacement. The first compensation signal can be applied to the one or more drive unit shear elements and the clamp element drive signal can be applied to the drive unit clamp element. A second displacement can be determined in response to the application of the first compensation signal and the clamp element drive signal. The second displacement can then be compared to a preselected threshold.Type: GrantFiled: November 15, 2019Date of Patent: January 24, 2023Assignee: FEI CompanyInventors: Edwin Verschueren, Paul Tacx
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Patent number: 11538652Abstract: To compensate for hysteresis in an actuator, a path between a first position and a second position can be selected, and a drive signal can be applied to an actuator element that includes a hysteresis-compensated portion to move an object along the selected path.Type: GrantFiled: November 15, 2019Date of Patent: December 27, 2022Assignee: FEI CompanyInventors: Edwin Verschueren, Paul Tacx
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Publication number: 20220157557Abstract: A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.Type: ApplicationFiled: February 3, 2022Publication date: May 19, 2022Applicant: FEI CompanyInventors: Bart Jozef Janssen, Edwin Verschueren, Erik Franken
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Patent number: 11257656Abstract: A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.Type: GrantFiled: April 8, 2020Date of Patent: February 22, 2022Assignee: FEI CompanyInventors: Bart Jozef Janssen, Edwin Verschueren, Erik Franken
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Publication number: 20210319975Abstract: A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.Type: ApplicationFiled: April 8, 2020Publication date: October 14, 2021Applicant: FEI CompanyInventors: Bart Jozef Janssen, Edwin Verschueren, Erik Franken
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Publication number: 20210151276Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element. A first displacement of the mover element can be determined. A first compensation signal to be applied to one or more drive unit shear elements can be determined based at least in part on the first displacement. The first compensation signal can be applied to the one or more drive unit shear elements and the clamp element drive signal can be applied to the drive unit clamp element. A second displacement can be determined in response to the application of the first compensation signal and the clamp element drive signal. The second displacement can then be compared to a preselected threshold.Type: ApplicationFiled: November 15, 2019Publication date: May 20, 2021Applicant: FEI CompanyInventors: Edwin Verschueren, Paul Tacx
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Publication number: 20210151277Abstract: To compensate for hysteresis in an actuator, a path between a first position and a second position can be selected, and a drive signal can be applied to an actuator element that includes a hysteresis-compensated portion to move an object along the selected path.Type: ApplicationFiled: November 15, 2019Publication date: May 20, 2021Applicant: FEI CompanyInventors: Edwin Verschueren, Paul Tacx