Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: A piston pump delivers precise and repeatable volumes of a fluid from a reservoir to a downstream component, and includes a piston that is rotatably and reciprocally mounted within a cylinder. The outer periphery of the piston forms an interference fit with the inner periphery of the cylinder. At least one groove is formed in the outer periphery of the piston, with the groove defining a precise volume between the piston and the cylinder, and extending in an axial direction of the piston. The cylinder includes an inlet port for providing fluid communication between a reservoir and the at least one groove when the piston is in a first position, and an exit port circumferentially spaced from the inlet port for providing fluid communication between the at least one groove and a downstream component when the first piston is rotated to a second position where the at least one groove is aligned with the exit port.

Abstract: A piston pump delivers precise and repeatable volumes of a fluid from a reservoir to a downstream component, and includes a piston that is rotatably and reciprocally mounted within a cylinder. The outer periphery of the piston forms an interference fit with the inner periphery of the cylinder. At least one groove is formed in the outer periphery of the piston, with the groove defining a precise volume between the piston and the cylinder, and extending in an axial direction of the piston. The cylinder includes an inlet port for providing fluid communication between a reservoir and the at least one groove when the piston is in a first position, and an exit port circumferentially spaced from the inlet port for providing fluid communication between the at least one groove and a downstream component when the first piston is rotated to a second position where the at least one groove is aligned with the exit port.

Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: The present invention is directed to a mass flow controller having an automatic pressure compensator in the form of a dome loaded pressure regulator, wherein the dome loaded pressure regulator is, in turn, controlled by a dome-loading gas line regulated by a pilot pressure regulator. The pilot pressure regulator and the mass flow controller are advantageously controlled by a single microprocessor, and may advantageously all be mounted to a single manifold block.

Abstract: Self actuating valve systems for fluid line networks comprising a main valving stem (3) with a driving-to-close bias spring (14) which is blocked by a detent ball (15) from closure against a valve seal (8), the ball itself being held by a removable pilot stem biassed to such holding action by a spring (17), the force of which can be automatically overcome at emergency temperature use condition by high force action of a shape memory spring (21). The main valving stem is manually resettable and the shape memory drivable pilot stem and related drive system are manually testable. A plurality of such valve systems are distributed in a fluid flow network for isolating an emergency temperature rise (e.g., fire region).