Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

Abstract: Disclosed are methods and apparatus for controlling electromagnetic field generation system to generate dynamic magnetic fields. The method can comprise: establishing a dynamic model that describes open-loop dynamics of the electromagnetic field generation system and has an unified state-space form with time delay; configuring a controller based on the dynamic model; applying, by the controller, a control signal to the electromagnetic field generation system; detecting one or more feedback signals from the electromagnetic field generation system; and updating, by the controller, the control signal for controlling the electromagnetic field generation system, according to a reference signal corresponding to a desired dynamic magnetic field, one or more compensated feedback signals, and system states. To address time delay and modeling error and to estimate system states, a Kalman filter and a Smith predictor based compensator can be incorporated.

Abstract: Disclosed are methods and apparatus for controlling electromagnetic field generation system to generate dynamic magnetic fields. The method can comprise: establishing a dynamic model that describes open-loop dynamics of the electromagnetic field generation system and has an unified state-space form with time delay; configuring a controller based on the dynamic model; applying, by the controller, a control signal to the electromagnetic field generation system; detecting one or more feedback signals from the electromagnetic field generation system; and updating, by the controller, the control signal for controlling the electromagnetic field generation system, according to a reference signal corresponding to a desired dynamic magnetic field, one or more compensated feedback signals, and system states. To address time delay and modeling error and to estimate system states, a Kalman filter and a Smith predictor based compensator can be incorporated.