Patents by Inventor Efe S. Ege

Efe S. Ege has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11735473
    Abstract: Methods of manufacturing memory devices having memory cells and corresponding selectors, and associated systems and devices, are disclosed herein. In one embodiment, a method of manufacturing a memory device includes (a) removing a protection layer formed over the memory cells and (b) forming a cap layer over the memory cells before forming a conductive via through the memory device. The cap layer is configured to protect the memory cells during operation and can comprise a resistive material. The protection layer can be more efficiently removed with improved process margin and less device health impact using a polishing process before the conductive via is formed, thus increasing the manufacturing margin of the memory device.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: August 22, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Jukuan Zheng, Sri Sai Sivakumar Vegunta, Kevin L. Baker, Josiah Jebaraj Johnley Muthuraj, Efe S. Ege
  • Publication number: 20220068702
    Abstract: Methods of manufacturing memory devices having memory cells and corresponding selectors, and associated systems and devices, are disclosed herein. In one embodiment, a method of manufacturing a memory device includes (a) removing a protection layer formed over the memory cells and (b) forming a cap layer over the memory cells before forming a conductive via through the memory device. The cap layer is configured to protect the memory cells during operation and can comprise a resistive material. The protection layer can be more efficiently removed with improved process margin and less device health impact using a polishing process before the conductive via is formed, thus increasing the manufacturing margin of the memory device.
    Type: Application
    Filed: November 11, 2021
    Publication date: March 3, 2022
    Inventors: Jukuan Zheng, Sri Sai Sivakumar Vegunta, Kevin L. Baker, Josiah Jebaraj Johnley Muthuraj, Efe S. Ege
  • Patent number: 11201083
    Abstract: Methods of manufacturing memory devices having memory cells and corresponding selectors, and associated systems and devices, are disclosed herein. In one embodiment, a method of manufacturing a memory device includes (a) removing a protection layer formed over the memory cells and (b) forming a cap layer over the memory cells before forming a conductive via through the memory device. The cap layer is configured to protect the memory cells during operation and can comprise a resistive material. The protection layer can be more efficiently removed with improved process margin and less device health impact using a polishing process before the conductive via is formed, thus increasing the manufacturing margin of the memory device.
    Type: Grant
    Filed: February 3, 2020
    Date of Patent: December 14, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jukuan Zheng, Sri Sai Sivakumar Vegunta, Kevin L. Baker, Josiah Jebaraj Johnley Muthuraj, Efe S. Ege
  • Publication number: 20210202299
    Abstract: Methods of manufacturing memory devices having memory cells and corresponding selectors, and associated systems and devices, are disclosed herein. In one embodiment, a method of manufacturing a memory device includes (a) removing a protection layer formed over the memory cells and (b) forming a cap layer over the memory cells before forming a conductive via through the memory device. The cap layer is configured to protect the memory cells during operation and can comprise a resistive material. The protection layer can be more efficiently removed with improved process margin and less device health impact using a polishing process before the conductive via is formed, thus increasing the manufacturing margin of the memory device.
    Type: Application
    Filed: February 3, 2020
    Publication date: July 1, 2021
    Inventors: Jukuan Zheng, Sri Sai Sivakumar Vegunta, Kevin L. Baker, Josiah Jebaraj Johnley Muthuraj, Efe S. Ege