Patents by Inventor Efe Sinan Ege

Efe Sinan Ege has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250133721
    Abstract: A variety of applications can include a memory device having an array of memory cells arranged as hexagonal cells, with each of the memory cells having a gate-all-around (GAA) transistor coupled to a capacitor. An access line can be coupled to gates of a first set of multiple GAA transistors of the memory cells. A digit line can be coupled to a second set of multiple GAA transistors of the memory cells, where the digit line is wrapped on a sidewall of an active area of each GAA transistor of the second set. Additional devices and methods are disclosed.
    Type: Application
    Filed: July 19, 2024
    Publication date: April 24, 2025
    Inventors: Fatma Arzum Simsek-Ege, Efe Sinan Ege, Haitao Liu
  • Publication number: 20250133719
    Abstract: A variety of applications can include a memory device having an array of memory cells, with each of the memory cells having a gate-all-around (GAA) transistor arranged as a hexagonal vertical channel transistor coupled to a capacitor. Access lines can be coupled to gates of the GAA transistors and digit lines can be coupled to pillar channels of the GAA transistors. A lattice can be included between the access lines and the digit lines, where the lattice has dielectric regions between and contacting non-dielectric regions. Each non-dielectric region can be positioned on and contacting a digit line and can contain digit contact junctions to the pillar channels of a set of the GAA transistors extending from the non-dielectric region. Additional devices and methods are disclosed.
    Type: Application
    Filed: July 18, 2024
    Publication date: April 24, 2025
    Inventors: Fatma Arzum Simsek-Ege, Christopher K. Morzano, Efe Sinan Ege
  • Publication number: 20250133720
    Abstract: A variety of applications can include a memory device having an array of memory cells arranged as hexagonal cells, with each of the memory cells having a gate-all-around (GAA) transistor coupled to a capacitor. An access line can be coupled to gates of a first set of multiple GAA transistors of the memory cells. A digit line can be coupled to a second set of multiple GAA transistors of the memory cells, where the digit line is separated from an adjacent digit line by an airgap. Additional devices and methods are disclosed.
    Type: Application
    Filed: July 18, 2024
    Publication date: April 24, 2025
    Inventors: Fatma Arzum Simsek-Ege, Efe Sinan Ege
  • Publication number: 20240224825
    Abstract: Methods, systems, and devices for a low resistance crosspoint architecture are described. A manufacturing system may deposit a thermal barrier material, followed by a first layer of a first conductive material, on a layered assembly including a patterned layer of electrode materials and a patterned layer of a memory material. The manufacturing system may etch a first area of the layered assembly to form a gap in the first layer of the first conductive material, the thermal barrier material, the patterned layer of the memory material, and the patterned layer of electrode materials. The manufacturing system may deposit a second conductive material to form a conductive via in the gap, where the conductive via extends to a height within the layered assembly that is above the thermal barrier material.
    Type: Application
    Filed: January 10, 2024
    Publication date: July 4, 2024
    Inventors: Rajasekhar Venigalla, Patrick M. Flynn, Josiah Jebaraj Johnley Muthuraj, Efe Sinan Ege, Kevin Lee Baker, Tao Nguyen, Davis Weymann
  • Patent number: 11882774
    Abstract: Methods, systems, and devices for a low resistance crosspoint architecture are described. A manufacturing system may deposit a thermal barrier material, followed by a first layer of a first conductive material, on a layered assembly including a patterned layer of electrode materials and a patterned layer of a memory material. The manufacturing system may etch a first area of the layered assembly to form a gap in the first layer of the first conductive material, the thermal barrier material, the patterned layer of the memory material, and the patterned layer of electrode materials. The manufacturing system may deposit a second conductive material to form a conductive via in the gap, where the conductive via extends to a height within the layered assembly that is above the thermal barrier material.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: January 23, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Rajasekhar Venigalla, Patrick M. Flynn, Josiah Jebaraj Johnley Muthuraj, Efe Sinan Ege, Kevin Lee Baker, Tao Nguyen, Davis Weymann
  • Patent number: 11778837
    Abstract: A memory system may include separate amounts or types of resistive material that may be deposited over memory cells and conductive vias using separate resistive layers in the access lines. A first resistive material layer may be deposited over the memory cells prior to performing an array termination etch used to deposit the conductive via. The array termination etch may remove the first resistive material over the portion of the array used to deposit the conductive via. A second resistive material layer may be deposited after the etch has occurred and the conductive via has been formed. The second resistive material layer may be deposited over the conductive via.
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: October 3, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lei Wei, Pengyuan Zheng, Kevin Lee Baker, Efe Sinan Ege, Adam Thomas Barton, Rajasekhar Venigalla
  • Publication number: 20220406847
    Abstract: A memory system may include separate amounts or types of resistive material that may be deposited over memory cells and conductive vias using separate resistive layers in the access lines. A first resistive material layer may be deposited over the memory cells prior to performing an array termination etch used to deposit the conductive via. The array termination etch may remove the first resistive material over the portion of the array used to deposit the conductive via. A second resistive material layer may be deposited after the etch has occurred and the conductive via has been formed. The second resistive material layer may be deposited over the conductive via.
    Type: Application
    Filed: June 22, 2022
    Publication date: December 22, 2022
    Inventors: Lei Wei, Pengyuan Zheng, Kevin Lee Baker, Efe Sinan Ege, Adam Thomas Barton, Rajasekhar Venigalla
  • Patent number: 11380732
    Abstract: A memory system may include separate amounts or types of resistive material that may be deposited over memory cells and conductive vias using separate resistive layers in the access lines. A first resistive material layer may be deposited over the memory cells prior to performing an array termination etch used to deposit the conductive via. The array termination etch may remove the first resistive material over the portion of the array used to deposit the conductive via. A second resistive material layer may be deposited after the etch has occurred and the conductive via has been formed. The second resistive material layer may be deposited over the conductive via.
    Type: Grant
    Filed: July 29, 2020
    Date of Patent: July 5, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Lei Wei, Pengyuan Zheng, Kevin Lee Baker, Efe Sinan Ege, Adam Thomas Barton, Rajasekhar Venigalla
  • Publication number: 20220069216
    Abstract: Methods, systems, and devices for a low resistance crosspoint architecture are described. A manufacturing system may deposit a thermal barrier material, followed by a first layer of a first conductive material, on a layered assembly including a patterned layer of electrode materials and a patterned layer of a memory material. The manufacturing system may etch a first area of the layered assembly to form a gap in the first layer of the first conductive material, the thermal barrier material, the patterned layer of the memory material, and the patterned layer of electrode materials. The manufacturing system may deposit a second conductive material to form a conductive via in the gap, where the conductive via extends to a height within the layered assembly that is above the thermal barrier material.
    Type: Application
    Filed: September 7, 2021
    Publication date: March 3, 2022
    Inventors: Rajasekhar Venigalla, Patrick M. Flynn, Josiah Jebaraj Johnley Muthuraj, Efe Sinan Ege, Kevin Lee Baker, Tao Nguyen, Davis Weymann
  • Publication number: 20220037403
    Abstract: A memory system may include separate amounts or types of resistive material that may be deposited over memory cells and conductive vias using separate resistive layers in the access lines. A first resistive material layer may be deposited over the memory cells prior to performing an array termination etch used to deposit the conductive via. The array termination etch may remove the first resistive material over the portion of the array used to deposit the conductive via. A second resistive material layer may be deposited after the etch has occurred and the conductive via has been formed. The second resistive material layer may be deposited over the conductive via.
    Type: Application
    Filed: July 29, 2020
    Publication date: February 3, 2022
    Inventors: Lei Wei, Pengyuan Zheng, Kevin Lee Baker, Efe Sinan Ege, Adam Thomas Barton, Rajasekhar Venigalla
  • Patent number: 11121317
    Abstract: Methods, systems, and devices for a low resistance crosspoint architecture are described. A manufacturing system may deposit a thermal barrier material, followed by a first layer of a first conductive material, on a layered assembly including a patterned layer of electrode materials and a patterned layer of a memory material. The manufacturing system may etch a first area of the layered assembly to form a gap in the first layer of the first conductive material, the thermal barrier material, the patterned layer of the memory material, and the patterned layer of electrode materials. The manufacturing system may deposit a second conductive material to form a conductive via in the gap, where the conductive via extends to a height within the layered assembly that is above the thermal barrier material.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: September 14, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Rajasekhar Venigalla, Patrick M. Flynn, Josiah Jebaraj Johnley Muthuraj, Efe Sinan Ege, Kevin Lee Baker, Tao Nguyen, Davis Weymann
  • Publication number: 20210151675
    Abstract: Methods, systems, and devices for a low resistance crosspoint architecture are described. A manufacturing system may deposit a thermal barrier material, followed by a first layer of a first conductive material, on a layered assembly including a patterned layer of electrode materials and a patterned layer of a memory material. The manufacturing system may etch a first area of the layered assembly to form a gap in the first layer of the first conductive material, the thermal barrier material, the patterned layer of the memory material, and the patterned layer of electrode materials. The manufacturing system may deposit a second conductive material to form a conductive via in the gap, where the conductive via extends to a height within the layered assembly that is above the thermal barrier material.
    Type: Application
    Filed: November 14, 2019
    Publication date: May 20, 2021
    Inventors: Rajasekhar Venigalla, Patrick M. Flynn, Josiah Jebaraj Johnley Muthuraj, Efe Sinan Ege, Kevin Lee Baker, Tao Nguyen, Davis Weymann