Patents by Inventor Efrain Quiles
Efrain Quiles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10665476Abstract: In one aspect, a valve assembly adapted to seal an opening in a chamber is disclosed. Valve assembly includes a housing being adapted for coupling to a chamber surface having the opening therein, the housing including a threshold portion positioned adjacent to the chamber opening, the threshold portion having one or more inlets adapted to supply gas to an interior region of the housing adjacent to the chamber opening; and a sealing surface adapted to selectively (1) seal the opening, and (2) retract from the opening so as not to obstruct substrate passage. Numerous other system aspects are provided, as are methods and computer program products in accordance with these and other aspects.Type: GrantFiled: July 18, 2014Date of Patent: May 26, 2020Assignee: Applied Materials, Inc.Inventors: Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat
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Patent number: 10515834Abstract: Systems and techniques for forming buffer gas microclimates around semiconductor wafers in environments external to a semiconductor processing chamber are disclosed. Such systems may include slot doors that may allow for single wafers to be removed from a multi-wafer stack while limiting outflow of buffer gas from a multi-wafer storage system, as well as buffer gas distributors that move in tandem with robot arms used to transport wafers for at least some of the movements of such robot arms.Type: GrantFiled: October 5, 2016Date of Patent: December 24, 2019Assignee: Lam Research CorporationInventors: Mohsen Salek, Richard M. Blank, Richard Howard Gould, Efrain Quiles
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Publication number: 20170125272Abstract: Systems and techniques for forming buffer gas microclimates around semiconductor wafers in environments external to a semiconductor processing chamber are disclosed. Such systems may include slot doors that may allow for single wafers to be removed from a multi-wafer stack while limiting outflow of buffer gas from a multi-wafer storage system, as well as buffer gas distributors that move in tandem with robot arms used to transport wafers for at least some of the movements of such robot arms.Type: ApplicationFiled: October 5, 2016Publication date: May 4, 2017Inventors: James Stephen van Gogh, Candi Kristoffersen, Mohsen Salek, Brandon Senn, Harmeet Singh, Derek John Witkowicki, Richard M. Blank, Richard Howard Gould, Efrain Quiles
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Publication number: 20150013771Abstract: In one aspect, a valve assembly adapted to seal an opening in a chamber is disclosed. Valve assembly includes a housing being adapted for coupling to a chamber surface having the opening therein, the housing including a threshold portion positioned adjacent to the chamber opening, the threshold portion having one or more inlets adapted to supply gas to an interior region of the housing adjacent to the chamber opening; and a sealing surface adapted to selectively (1) seal the opening, and (2) retract from the opening so as not to obstruct substrate passage. Numerous other system aspects are provided, as are methods and computer program products in accordance with these and other aspects.Type: ApplicationFiled: July 18, 2014Publication date: January 15, 2015Inventors: Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat
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Patent number: 8796589Abstract: In a first aspect, a first substrate processing system is provided that includes (1) a chamber having a plurality of opening through which a substrate may be transported; (2) a substrate carrier opener coupled to a first one of the plurality of openings; (3) a thermal processing chamber coupled to a second one of the plurality of openings; and (4) a wafer handler contained within the chamber, having a substrate clamping blade and a blade adapted to transport high temperature substrates.Type: GrantFiled: July 13, 2002Date of Patent: August 5, 2014Assignee: Applied Materials, Inc.Inventors: Efrain Quiles, Mehran Behdjat, Robert B. Lowrance, Michael Robert Rice, Brent Vopat
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Publication number: 20110041764Abstract: A batch processing platform used for ALD or CVD processing is configured for high throughput and minimal footprint. In one embodiment, the processing platform comprises an atmospheric transfer region, at least one batch processing chamber with a buffer chamber and staging platform, and a transfer robot disposed in the transfer region wherein the transfer robot has at least one substrate transfer arm that comprises multiple substrate handling blades. The platform may include two batch processing chambers configured with a service aisle disposed therebetween to provide necessary service access to the transfer robot and the deposition stations. In another embodiment, the processing platform comprises at least one batch processing chamber, a substrate transfer robot that is adapted to transfer substrates between a FOUP and a processing cassette, and a cassette transfer region containing a cassette handler robot. The cassette handler robot may be a linear actuator or a rotary table.Type: ApplicationFiled: November 3, 2010Publication date: February 24, 2011Inventors: Aaron Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew Constant, Efrain Quiles, Michael R. Rice, Gary J. Rosen, Vinay K. Shah
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Patent number: 7833351Abstract: A batch processing platform used for ALD or CVD processing is configured for high throughput and minimal footprint. In one embodiment, the processing platform comprises an atmospheric transfer region, at least one batch processing chamber with a buffer chamber and staging platform, and a transfer robot disposed in the transfer region wherein the transfer robot has at least one substrate transfer arm that comprises multiple substrate handling blades. The platform may include two batch processing chambers configured with a service aisle disposed therebetween to provide necessary service access to the transfer robot and the deposition stations. In another embodiment, the processing platform comprises at least one batch processing chamber, a substrate transfer robot that is adapted to transfer substrates between a FOUP and a processing cassette, and a cassette transfer region containing a cassette handler robot. The cassette handler robot may be a linear actuator or a rotary table.Type: GrantFiled: June 26, 2006Date of Patent: November 16, 2010Assignee: Applied Materials, Inc.Inventors: Aaron Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew Constant, Efrain Quiles, Michael R. Rice, Gary J. Rosen, Vinay K. Shah
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Publication number: 20070295274Abstract: A batch processing platform used for ALD or CVD processing is configured for high throughput and minimal footprint. In one embodiment, the processing platform comprises an atmospheric transfer region, at least one batch processing chamber with a buffer chamber and staging platform, and a transfer robot disposed in the transfer region wherein the transfer robot has at least one substrate transfer arm that comprises multiple substrate handling blades. The platform may include two batch processing chambers configured with a service aisle disposed therebetween to provide necessary service access to the transfer robot and the deposition stations. In another embodiment, the processing platform comprises at least one batch processing chamber, a substrate transfer robot that is adapted to transfer substrates between a FOUP and a processing cassette, and a cassette transfer region containing a cassette handler robot. The cassette handler robot may be a linear actuator or a rotary table.Type: ApplicationFiled: June 26, 2006Publication date: December 27, 2007Inventors: Aaron Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew Constant, Efrain Quiles, Michael R. Rice, Gary J. Rosen, Vinay K. Shah
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Publication number: 20070210595Abstract: A rim mounted tire lifting bar including a feature on a first end to allow lifting of rim up tires and a feature on the second end on lifting of rim down tires for tires mounted on a rim. A second bar includes an element on one end to engage the lip of one tire sidewall and allow tipping up of the tire when the tires not mounted on a rim. These may either be sold separately or sold together as a kit.Type: ApplicationFiled: March 8, 2007Publication date: September 13, 2007Inventors: Efrain Quiles, Francisco Duarte
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Publication number: 20050072716Abstract: In a first aspect, a first substrate processing system is provided that includes (1) a chamber having a plurality of openings through which a substrate may be transported; (2) a substrate carrier opener coupled to a first one of the plurality of openings; (3) a thermal processing chamber coupled to a second one of the plurality of openings; and (4) a wafer handler contained within the chamber, having a substrate clamping blade and a blade adapted to transport high temperature substrates. Numerous other aspects are provided, as are methods and computer program products in accordance with these and other aspects.Type: ApplicationFiled: July 13, 2002Publication date: April 7, 2005Inventors: Efrain Quiles, Mehran Behdjat, Robert Lowrance, Michael Rice, Brent Vopat
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Patent number: 6562189Abstract: A plasma reactor includes a chamber adapted to support an evacuated plasma environment, a passageway connecting the chamber to a region external of the chamber, the passageway being defined by spaced opposing passageway walls establishing a passageway distance therebetweeen, and a plasma-confining magnet assembly adjacent the passageway.Type: GrantFiled: August 31, 2000Date of Patent: May 13, 2003Assignee: Applied Materials Inc.Inventors: Efrain Quiles, Hamid Noorbakhsh, James D Carducci
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Patent number: 6422618Abstract: An apparatus is provided for locking and unlocking a camper shell from the inside. The device can be purchased as an inexpensive after market part and easily and quickly installed without the need for expensive tooling. The device includes a handle having proximal and distal ends and fashioned with a lateral bore at its proximal end for connecting with a torsion bar already existing on the latching mechanism of the camper shell. The distal end of the handle includes a cam, pivotally connected thereto, which can move between a position which in which the cam is generally flush with the handle and other positions in which the cam extends laterally from the handle. A cam lock is provided to engage the cam and hold it in one or more selected positions, the positions providing corresponding amounts of lateral extension from the handle. The when extended, the cam prevents the handle from being turned, thereby preventing the camper shell from being opened.Type: GrantFiled: May 5, 2000Date of Patent: July 23, 2002Inventors: David Guldner, Efrain Quiles
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Patent number: 6320736Abstract: A chuck 28 for holding a substrate 4 comprises a surface 27 capable of receiving the substrate 4, the surface 27 having a gas inlet port 40 and a gas exhaust port 42. A non-sealing protrusion is between the gas inlet port 40 and the gas exhaust port 42. The non-sealing protrusion 44 impedes the flow of heat transfer gas between the gas inlet port 40 and the gas exhaust port 42 without blocking the flow of heat transfer gas. Preferably, a sealing protrusion 46 is provided around the periphery of the chuck 28 to form a substantially gas-tight seal with the substrate 4 to enclose and prevent leakage of heat transfer gas into a surrounding chamber 6.Type: GrantFiled: May 17, 1999Date of Patent: November 20, 2001Assignee: Applied Materials, Inc.Inventors: Shamouil Shamouilian, Arnold Kholodenko, Siamak Salimian, Hamid Noorbakhsh, Efrain Quiles, Dennis S. Grimard
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Patent number: 6015465Abstract: A temperature control system 10 is used to control the temperature of a chamber surface 15, such as a convoluted external surface, of a process chamber 25 that is used to process a semiconductor substrate 30. The temperature control system 10 comprises a vapor chamber 100 that forms an enclosure adjoining or surrounding the process chamber surface 15. A fluid distributor 115 in the vapor chamber 100 applies a fluid film 130 onto the process chamber surface 15. Vaporization of the fluid film 130 from the chamber surface 15 controls the temperature of the chamber surface. Optionally, a vent 165 in the vapor chamber 100 can be used to adjust the vaporization temperature of the fluid in the vapor chamber.Type: GrantFiled: April 8, 1998Date of Patent: January 18, 2000Assignee: Applied Materials, Inc.Inventors: Arnold Kholodenko, Ke Ling Lee, Maya Shendon, Efrain Quiles