Patents by Inventor Efthymios STRATIS

Efthymios STRATIS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate warpage determination system
    Patent number: 12675052
    Abstract: A substrate warpage determination system comprises at least three first supporting devices and at least three second supporting devices, forming first and second substrate support areas configured to carry a substrate, an actuator configured to move the at least three second supporting devices in a vertical direction, and a controller to drive the actuator. The controller is configured to determine a force exerted by the actuator, compare the determined force exerted by the actuator at the position in a vertical direction of the second substrate support area relative to the first substrate support area to a predetermined force at a predetermined position in the vertical direction of the second substrate support area relative to the first substrate support area, and determine a warpage of the substrate from the comparison.
    Type: Grant
    Filed: March 17, 2023
    Date of Patent: July 7, 2026
    Assignee: ASML Netherlands B.V.
    Inventors: Efthymios Stratis, Oleksiy Sergiyovich Galaktionov, Thomas Poiesz, Ilya Malakhovsky
  • SUBSTRATE WARPAGE DETERMINATION SYSTEM
    Publication number: 20250199421
    Abstract: A substrate warpage determination system comprises at least three first supporting devices and at least three second supporting devices, forming first and second substrate support areas configured to carry a substrate, an actuator configured to move the at least three second supporting devices in a vertical direction, and a controller to drive the actuator. The controller is configured to determine a force exerted by the actuator, compare the determined force exerted by the actuator at the position in a vertical direction of the second substrate support area relative to the first substrate support area to a predetermined force at a predetermined position in the vertical direction of the second substrate support area relative to the first substrate support area, and determine a warpage of the substrate from the comparison.
    Type: Application
    Filed: March 17, 2023
    Publication date: June 19, 2025
    Applicant: ASML Netherlands B.V.
    Inventors: Efthymios STRATIS, Oleksiy Sergiyovich GALAKTIONOV, Thomas POIESZ, Ilya MALAKHOVSKY