Patents by Inventor Egbert Matthus

Egbert Matthus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS-microviscometer
    Patent number: 9638617
    Abstract: Micro-electromechanical device for measuring the viscosity of a fluid, comprises a measuring chamber with a micromechanical actuator, arranged as a cantilever above a metallically conductive counter electrode, elastically deformable towards the counter electrode, surrounded by the fluid to be measured and made of a metallically conductive material, a two-terminal RF voltage source that can be switched off, having a first output terminal connected to the actuator, and a second output terminal connected to the counter electrode, and which is designed to output an RF voltage signal that is suitable for deflecting the actuator out of its rest position, and a measuring device to detect a change in the frequency, amplitude or phase of the RF signal in order to determine a measurement value for the viscosity-dependent speed at which the actuator is deformed.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: May 2, 2017
    Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ-INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
    Inventors: Mario Birkholz, Jurgen Drews, Karl-Ernst Ehwald, Dieter Genschow, Ulrich Haak, Philip Kulse, Egbert Matthus, Katrin Schulz, Wolfgang Winkler, Dirk Wolansky, Marlen Frohlich
  • MEMS-Microviscometer
    Publication number: 20140000344
    Abstract: Micro-electromechanical device for measuring the viscosity of a fluid, comprises a measuring chamber with a micromechanical actuator, arranged as a cantilever above a metallically conductive counter electrode, elastically deformable towards the counter electrode, surrounded by the fluid to be measured and made of a metallically conductive material, a two-terminal RF voltage source that can be switched off, having a first output terminal connected to the actuator, and a second output terminal connected to the counter electrode, and which is designed to output an RF voltage signal that is suitable for deflecting the actuator out of its rest position, and a measuring device to detect a change in the frequency, amplitude or phase of the RF signal in order to determine a measurement value for the viscosity-dependent speed at which the actuator is deformed.
    Type: Application
    Filed: June 19, 2013
    Publication date: January 2, 2014
    Inventors: Mario Birkholz, Jurgen Drews, Karl-Ernst Ehwald, Dieter Genschow, Ulrich Haak, Philip Kulse, Egbert Matthus, Katrin Schulz, Wolfgang Winkler, Dirk Wolansky, Marlen Frohlich