Patents by Inventor Egbert Woelk
Egbert Woelk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11680318Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: GrantFiled: May 31, 2022Date of Patent: June 20, 2023Assignee: Edwards Semiconductor Solutions LLCInventors: Egbert Woelk, Ronald L. Dicarlo, Jr.
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Publication number: 20220290299Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: ApplicationFiled: May 31, 2022Publication date: September 15, 2022Applicant: Ceres Technologies, Inc.Inventors: Egbert WOELK, Ronald L. DICARLO, Jr.
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Patent number: 11345997Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: GrantFiled: June 8, 2020Date of Patent: May 31, 2022Assignee: Ceres Technologies, Inc.Inventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
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Patent number: 11229931Abstract: Techniques for reducing biofouling on optical equipment, using minimum power in a marine environment are provided. An example apparatus for reducing biofouling in a marine environment includes a housing including a cavity and a convex ultraviolet transparent window disposed over the cavity, an optical device disposed in the cavity and directed towards the convex ultraviolet transparent window, one or more ultraviolet light emitting diodes disposed in the cavity and directed toward the convex ultraviolet transparent window, and a controller operably coupled to the one or more ultraviolet light emitting diodes and configured to provide at least one lamp power function to the one or more ultraviolet light emitting diodes, wherein the at least one lamp power function is based on at least a flash power value, a flash duration, and a rest duration.Type: GrantFiled: November 9, 2020Date of Patent: January 25, 2022Assignee: InnovaSea Systems, Inc.Inventor: Egbert Woelk
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Publication number: 20210138519Abstract: Techniques for reducing biofouling on optical equipment, using minimum power in a marine environment are provided. An example apparatus for reducing biofouling in a marine environment includes a housing including a cavity and a convex ultraviolet transparent window disposed over the cavity, an optical device disposed in the cavity and directed towards the convex ultraviolet transparent window, one or more ultraviolet light emitting diodes disposed in the cavity and directed toward the convex ultraviolet transparent window, and a controller operably coupled to the one or more ultraviolet light emitting diodes and configured to provide at least one lamp power function to the one or more ultraviolet light emitting diodes, wherein the at least one lamp power function is based on at least a flash power value, a flash duration, and a rest duration.Type: ApplicationFiled: November 9, 2020Publication date: May 13, 2021Inventor: Egbert WOELK
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Patent number: 10864559Abstract: Techniques for reducing biofouling on optical equipment, using minimum power in a marine environment are provided. An example of an apparatus according to the disclosure includes a housing including a cavity and an ultraviolet transparent window disposed over the cavity, an optical device disposed in the cavity and directed towards the ultraviolet transparent window, one or more ultraviolet light emitting diodes disposed in the cavity and directed towards the ultraviolet transparent window, and a controller operably coupled to the one or more ultraviolet light emitting diodes and configured to provide at least one lamp power function to the one or more ultraviolet light emitting diodes, wherein the at least one lamp power function is based on at least a flash power value, a flash duration, a rest power value and a rest duration.Type: GrantFiled: September 14, 2018Date of Patent: December 15, 2020Assignee: INNOVENT TECHNOLOGIES, LLCInventor: Egbert Woelk
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Publication number: 20200299837Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: ApplicationFiled: June 8, 2020Publication date: September 24, 2020Applicant: Ceres Technologies, Inc.Inventors: Egbert WOELK, Ronald L. DICARLO, JR.
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Patent number: 10676821Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: GrantFiled: July 31, 2018Date of Patent: June 9, 2020Assignee: Ceres Technologies, Inc.Inventors: Egbert Woelk, Ronald L. Dicarlo, Jr.
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Publication number: 20190084015Abstract: Techniques for reducing biofouling on optical equipment, using minimum power in a marine environment are provided. An example of an apparatus according to the disclosure includes a housing including a cavity and an ultraviolet transparent window disposed over the cavity, an optical device disposed in the cavity and directed towards the ultraviolet transparent window, one or more ultraviolet light emitting diodes disposed in the cavity and directed towards the ultraviolet transparent window, and a controller operably coupled to the one or more ultraviolet light emitting diodes and configured to provide at least one lamp power function to the one or more ultraviolet light emitting diodes, wherein the at least one lamp power function is based on at least a flash power value, a flash duration, a rest power value and a rest duration.Type: ApplicationFiled: September 14, 2018Publication date: March 21, 2019Inventor: Egbert WOELK
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Publication number: 20190032207Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: ApplicationFiled: July 31, 2018Publication date: January 31, 2019Applicant: Ceres Technologies, Inc.Inventors: Egbert WOELK, Ronald L. DICARLO, JR.
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Publication number: 20180334744Abstract: Disclosed is a method of providing a constant concentration of a metal-containing precursor compound in the vapor phase in a carrier gas. Such method is particularly useful in supplying a constant concentration of a gaseous metal-containing compound to a plurality of vapor deposition reactors.Type: ApplicationFiled: July 30, 2018Publication date: November 22, 2018Applicant: Ceres Technologies, Inc.Inventors: Egbert WOELK, Ronald L. DICARLO
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Patent number: 10066296Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: GrantFiled: January 8, 2016Date of Patent: September 4, 2018Assignee: Ceres Technologies, Inc.Inventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
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Patent number: 10060030Abstract: Disclosed is a method of providing a constant concentration of a metal-containing precursor compound in the vapor phase in a carrier gas. Such method is particularly useful in supplying a constant concentration of a gaseous metal-containing compound to a plurality of vapor deposition reactors.Type: GrantFiled: May 20, 2016Date of Patent: August 28, 2018Assignee: Ceres Technologies, Inc.Inventors: Egbert Woelk, Ronald L. DiCarlo
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Patent number: 9957612Abstract: Disclosed herein is a delivery device comprising a chamber; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance.Type: GrantFiled: December 11, 2014Date of Patent: May 1, 2018Assignee: CERES TECHNOLOGIES, INC.Inventors: Egbert Woelk, Ronald L. DiCarlo, Deodatta Vinayak Shenai-Khatkhate
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Publication number: 20160265113Abstract: Disclosed is a method of providing a constant concentration of a metal-containing precursor compound in the vapor phase in a carrier gas. Such method is particularly useful in supplying a constant concentration of a gaseous metal-containing compound to a plurality of vapor deposition reactors.Type: ApplicationFiled: May 20, 2016Publication date: September 15, 2016Inventors: Egbert WOELK, Ronald L. DiCARLO
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Patent number: 9416452Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: GrantFiled: February 27, 2015Date of Patent: August 16, 2016Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLCInventors: Egbert Woelk, Ronald L. DiCarlo
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Publication number: 20160122870Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: ApplicationFiled: January 8, 2016Publication date: May 5, 2016Inventors: Egbert Woelk, Ronald L. DiCarlo
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Patent number: 9243325Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: GrantFiled: July 18, 2012Date of Patent: January 26, 2016Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLCInventors: Egbert Woelk, Ronald L. DiCarlo, Jr.
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Publication number: 20150203962Abstract: Disclosed herein is a delivery device comprising a chamber; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance.Type: ApplicationFiled: December 11, 2014Publication date: July 23, 2015Inventors: Egbert Woelk, Ronald L. DiCarlo, Deodatta Vinayak Shenai-Khatkhate
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Publication number: 20150167172Abstract: A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.Type: ApplicationFiled: February 27, 2015Publication date: June 18, 2015Inventors: Egbert Woelk, Ronald L. DiCarlo