Patents by Inventor Ehud Poles

Ehud Poles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In situ module for particle removal from solid-state surfaces
    Patent number: 6949147
    Abstract: Apparatus and a method for removing particles from the surface of a substrate include determining respective position coordinates of the particles on the surface. A beam of electromagnetic energy is directed via an optical cleaning arm at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.
    Type: Grant
    Filed: May 13, 2004
    Date of Patent: September 27, 2005
    Assignee: Oramir Semiconductor Equipment Ltd.
    Inventors: Yoram Uziel, David Yogev, Ehud Poles, Amir Wachs
  • In Situ module for particle removal from solid-state surfaces
    Publication number: 20050000540
    Abstract: Apparatus and a method for removing particles from the surface of a substrate include determining respective position coordinates of the particles on the surface. A beam of electromagnetic energy is directed via an optical cleaning arm at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.
    Type: Application
    Filed: May 13, 2004
    Publication date: January 6, 2005
    Inventors: Yoram Uziel, David Yogev, Ehud Poles, Amir Wachs
  • In situ module for particle removal from solid-state surfaces
    Patent number: 6827816
    Abstract: Apparatus and a method for removing particles from the surface of a substrate include determining respective position coordinates of the particles on the surface. A beam of electromagnetic energy is directed via an optical cleaning arm at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.
    Type: Grant
    Filed: November 22, 2000
    Date of Patent: December 7, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Yoram Uziel, David Yogev, Ehud Poles, Amir Wachs