Abstract: A substrate treatment apparatus (1) capable of performing the surface treatment of a treated substrate (W) by placing the treated substrate on a substrate support body (2) and dripping a treatment liquid on the surface of the substrate while rotating the substrate support body (2). The substrate support body (2) comprises a circular casserole-like base (3), a top board (10) generally formed in a disk shape, having a longitudinal cross section of reverse trapezoidal shape, and fitted to the upper opening of the base, and a hollow rotating shaft (15) fitted to the base (3) or the top board (10) at its rotating axis. The apparatus is characterized in that a gas blowout nozzle (14) comprising a plurality of slit-like grooves radially extending from the hollow rotating shaft (15) to the outside is formed in at least one surface selected from the contact surface (13) of the top board (10) and the upper opening contact surface (5a) of the base (3) brought into contact with each other by the fitting.

Abstract: A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with air in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere.An inert gas mixing pipe is connected for dilution to an exhaust gas feed section, an enclosure pipe is fitted to the outer circumference of an exhaust gas introduction pipe introduced into the combustion chamber to constitute a double pipe structure, and the enclosure pipe is connected at the rear end thereof to an inert gas feed pipe and slightly protuded at the top end thereof ahead of the top end for the exhaust gas introduction pipe.