Patents by Inventor Eiichi Hazaki
Eiichi Hazaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8638026Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.Type: GrantFiled: October 6, 2009Date of Patent: January 28, 2014Assignee: Hitachi High-Technologies CorporationInventors: Masashi Shibahara, Mikio Tokuyama, Koichiro Takeuchi, Shigeru Haneda, Osamu Yamada, Naoki Sakamoto, Eiichi Hazaki, Akito Tanokuchi
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Patent number: 8074293Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: GrantFiled: May 26, 2009Date of Patent: December 6, 2011Assignee: Hitachi High-Technologies CorporationInventors: Eiichi Hazaki, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada
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Publication number: 20110260558Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.Type: ApplicationFiled: October 6, 2009Publication date: October 27, 2011Inventors: Masashi Shibahara, Mikio Tokuyama, Koichiro Takeuchi, Shigeru Haneda, Osamu Yamada, Naoki Sakamoto, Eiichi Hazaki, Akito Tanokuchi
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Patent number: 7598755Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.Type: GrantFiled: May 9, 2008Date of Patent: October 6, 2009Assignee: Hitachi High-Technologies CorporationInventors: Takashi Furukawa, Takayuki Mizuno, Eiichi Hazaki, Hirofumi Sato
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Publication number: 20090230984Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: ApplicationFiled: May 26, 2009Publication date: September 17, 2009Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Eiichi HAZAKI, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada
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Patent number: 7553334Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: GrantFiled: October 23, 2007Date of Patent: June 30, 2009Assignee: Hitachi High-Technologies CorporationInventors: Eiichi Hazaki, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada
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Publication number: 20080218185Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.Type: ApplicationFiled: May 9, 2008Publication date: September 11, 2008Inventors: Takashi FURUKAWA, Takayuki MIZUNO, Eiichi HAZAKI, Hirofumi SATO
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Patent number: 7372283Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.Type: GrantFiled: April 5, 2006Date of Patent: May 13, 2008Assignee: Hitachi High-Technologies CorporationInventors: Takashi Furukawa, Takayuki Mizuno, Eiichi Hazaki, Hirofumi Sato
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Publication number: 20080048699Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: ApplicationFiled: October 23, 2007Publication date: February 28, 2008Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Eiichi Hazaki, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada
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Patent number: 7297945Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: GrantFiled: December 3, 2004Date of Patent: November 20, 2007Assignee: Hitachi High-Technologies CorporationInventors: Eiichi Hazaki, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada
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Patent number: 7129727Abstract: A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.Type: GrantFiled: October 26, 2005Date of Patent: October 31, 2006Assignee: Hitachi High-Technologies CorporationInventors: Tsutomu Saito, Osamu Yamada, Eiichi Hazaki, Yasuhiko Nara, Hirofumi Sato, Yoshikazu Inada, Yoshinori Numata
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Publication number: 20060192574Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.Type: ApplicationFiled: April 5, 2006Publication date: August 31, 2006Inventors: Takashi Furukawa, Takayuki Mizuno, Eiichi Hazaki, Hirofumi Sato
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Patent number: 7071713Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.Type: GrantFiled: December 22, 2004Date of Patent: July 4, 2006Assignee: Hitachi High-Technologies CorpoartionInventors: Takashi Furukawa, Takayuki Mizuno, Eiichi Hazaki, Hirofumi Sato
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Publication number: 20060087330Abstract: A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.Type: ApplicationFiled: October 26, 2005Publication date: April 27, 2006Inventors: Tsutomu Saito, Osamu Yamada, Eiichi Hazaki, Yasuhiko Nara, Hirofumi Sato, Yoshikazu Inada, Yoshinori Numata
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Patent number: 7015483Abstract: A focused ion beam system comprises a specimen chamber, a FIB column, a SEM stage, a side entry stage, a TEM specimen holder, a micro-sampling manipulator, and a SEM holder exchanger chamber. The SEM stage comprises an x-table, a y-table, a z-table, a rotation table, and a tilt table for moving a specimen. The side entry stage comprises an x-micromotion driver and a yzt-micromotion driver which are disposed in the specimen chamber to oppose each other. The x-micromotion driver is disposed in a hollow area defined in a tilt shaft provided for the tilt table.Type: GrantFiled: June 9, 2004Date of Patent: March 21, 2006Assignee: Hitachi High-Technologies CorporationInventors: Wataru Suzuki, Eiichi Hazaki
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Publication number: 20050140379Abstract: A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.Type: ApplicationFiled: December 22, 2004Publication date: June 30, 2005Inventors: Takashi Furukawa, Takayuki Mizuno, Eiichi Hazaki, Hirofumi Sato
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Publication number: 20050139781Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: ApplicationFiled: December 3, 2004Publication date: June 30, 2005Inventors: Eiichi Hazaki, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada
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Publication number: 20040251413Abstract: A focused ion beam system comprises a specimen chamber, a FIB column, a SEM stage, a side entry stage, a TEM specimen holder, a micro-sampling manipulator, and a SEM holder exchanger chamber. The SEM stage comprises an x-table, a y-table, a z-table, a rotation table, and a tilt table for moving a specimen. The side entry stage comprises an x-micromotion driver and a yzt-micromotion driver which are disposed in the specimen chamber to oppose each other. The x-micromotion driver is disposed in a hollow area defined in a tilt shaft provided for the tilt table.Type: ApplicationFiled: June 9, 2004Publication date: December 16, 2004Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Wataru Suzuki, Eiichi Hazaki
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Patent number: 6403968Abstract: Oil from an oil source is introduced into an inside of a reciprocal oil hydraulic pressure cylinder through a port, and a lock shaft is pushed against a lock plate by the oil pressure to restrict movement of a tilt table. A cylindrical portion made of a material having a large friction coefficient to the lock plate is attached to a top end of the lock shaft so as to contact with the lock plate in a surface contact state. Releasing of stage locking is performed by introducing the oil into the inside of the reciprocal oil hydraulic pressure cylinder through another port to draw back the lock shaft by the oil pressure. Thereby, the stiffness of the sample stage lock mechanism in the x-direction becomes large and the friction force in the y- and z-directions also becomes large. Therefore, vibration of the tilt table in the x-, y- and z-directions can be effectively suppressed.Type: GrantFiled: July 2, 1999Date of Patent: June 11, 2002Assignee: Hitachi, Ltd.Inventors: Eiichi Hazaki, Masaki Kurihara, Kaname Takahashi
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Patent number: 5393977Abstract: A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.Type: GrantFiled: June 1, 1993Date of Patent: February 28, 1995Assignee: Hitachi, Ltd.Inventors: Akimitsu Okura, Mitsugu Sato, Osamu Yamada, Yasushi Nakaizumi, Eiichi Hazaki