Abstract: A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.

Abstract: A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.

Abstract: A skylight window formed in a top roof of an automotive car body is either fully or partly opened and closed by front and rear sliding roof portions. The front and rear sliding roof portions, or roofs, each independently moves between closed and open positions. The front sliding roof is guided to its open position by front roof guide mechanisms disposed on opposite sides of the skylight window so as to locate the front sliding roof over a rear stationary roof in the open position. The rear sliding roof is guided to its open position by rear guide mechanisms disposed on opposite sides of the skylight window so as to locate the rear sliding roof under the rear stationary roof in the open position. These front and rear sliding roofs, when closed, are even with a plane including the top roof of the card body.

Abstract: An automobile rear body structure includes a roof panel, for forming an upper surface of a roof portion of a vehicle body, which is provided with an integrally formed downwardly extending portion to form an outer surface of a rear pillar at a rear side portion thereof. The rear body structure also includes a rear fender panel joined to a lower end of the downwardly extending portion for forming an outer surface of a rear side wall, a quarter panel located inside the rear fender panel, and a reinforcement member for connecting the rear fender panel and the quarter panel at a location near a lower end of the rear pillar. The reinforcement member may be formed by bending the rear fender panel inwardly from a joint between the rear fender panel and the downwardly extending portion of the roof panel. Alternatively, the reinforcement member may be formed of a separate reinforcement element.