Abstract: An electrostatic chuck includes a first electrode provided in a first plane, a second electrode provided in a second plane parallel to the first plane, and an insulator. The second electrode includes a plurality of portions which intersect with an intersection line between a region in which the first electrode is orthogonally projected to the second plane and a third plane vertical to the second plane. The insulator is provided between the first and second electrodes.

Abstract: An electrostatic chuck includes a first electrode provided in a first plane, a second electrode provided in a second plane parallel to the first plane, and an insulator. The second electrode includes a plurality of portions which intersect with an intersection line between a region in which the first electrode is orthogonally projected to the second plane and a third plane vertical to the second plane. The insulator is provided between the first and second electrodes.

Abstract: A valve includes a housing which includes a first opening part connectable to a first pipe and a second opening part connectable to a second pipe. A first valve is provided in the housing and is capable of being inserted into or removed from between the first opening part and the second opening part. The first valve includes an outer edge located outside an outer edge of the first or second opening part. The first valve has a third opening part smaller than the first and second opening parts. A second valve is provided in the housing, and is capable of being inserted into or removed from between the first opening part and the second opening part. The second valve includes an outer edge located outside an outer edge of the third opening part. The second valve is capable of closing at least a part of the third opening part.

Abstract: According to one embodiment, a deposition apparatus includes a plasma gun, a detector, and a controller. The plasma gun is capable of ejecting a plasma gas, and is capable of forming a film on a work piece exposed to the plasma gas. The detector detects a temperature or a luminous intensity in the plasma gas in a direction of ejection of the plasma gas. The controller controls a distance between the work piece and the plasma gun based on the temperature or the luminous intensity obtained from the detector, so that the plasma gas has a temperature in a range from a first temperature to a second temperature or a luminous intensity in a range from a first luminous intensity to a second luminous intensity is irradiated to the work piece.